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US 11,441,234 B2Granted
Liquid phase epitaxy of III-V materials and alloys
AssigneeUniversity of Louisville Research Foundation, Inc.
InventorsMahendra K. Sunkara, Daniel F. Jaramillo-Cabanzo, Sonia J. Calero-Barney
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Abstract
Provided herein are methods of performing liquid phase epitaxy (LPE) of III-V compounds and alloys at low pressures using pulsed nitrogen plasma to form an epitaxial layer e.g. on a substrate. The pulse sequence of plasma (with on and off time scales) enables LPE but avoids crust formation on top of molten metal. The concentration of nitrogen inside the molten metal is controlled to limit spontaneous nucleation.
Claims14
A method of making an epitaxial layer of a III-V compound, comprising
- positioning a liquid phase Group III metal or alloy thereof on a substrate;
- and
- exposing the liquid phase Group III metal or alloy thereof to a pulsed Group V plasma to form the epitaxial layer of the III-V compound on a surface of the substrate.
Dependencies are inferred from the claim text.