# US 11,441,225 B2 · Substrate liquid processing apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,441,225 B2 - Document ID: US11441225B2 - Status: Granted - Kind: B2 - Application number: 16/768,245 - Filed: 2018-11-27 - Published: 2021-06-10 - Granted: 2022-09-13 - Earliest claimed: 2017-12-01 - Assignees: Tokyo Electron Limited - Applicants: Tokyo Electron Limited - Inventors: Kazuki Motomatsu; Satoshi Kaneko - Web page: https://patentgrep.com/patent/US11441225B2 ## CPC - C23C 18/1619: {Apparatus for electroless plating} - C23C 18/168: {Control of temperature, e.g. temperature of bath, substrate} - B05B 13/02: Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work (B05B13/06 takes precedence) - B05C 5/001: {incorporating means for heating or cooling the liquid or other fluent material (B05C11/1042 takes precedence)} - B05C 13/00: Means for manipulating or holding work, e.g. for separate articles {(B05C1/0821 takes precedence)} - C23C 18/1628: {Specific elements or parts of the apparatus} - C23C 18/1642: {semiconductor (semiconductor H10P14/48)} - C23C 18/1676: {Heating of the solution} - C23C 18/31: Coating with metals - H10P 52/00: Grinding, lapping or polishing of wafers, substrates or parts of devices - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - B05B: SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES (spray-mixers with nozzles B01F25/72; processes for applying liquids or other fluent materials to surfaces by spraying B05D) - B05C: APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (spraying apparatus, atomising apparatus, nozzles B05B; plant for applying liquids or other fluent materials to objects by electrostatic spraying B05B5/08) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A substrate liquid processing apparatus configured to perform a heating control over a processing liquid on a substrate with high accuracy in a unit of zones is provided. The substrate liquid processing apparatus includes a substrate holder configured to hold the substrate; a processing liquid supply configured to supply the processing liquid onto a processing surface of the substrate; and a heating unit configured to heat the processing liquid on the processing surface. The heating unit includes a heater, and a first sheet-shaped body and a second sheet-shaped body which are disposed to face the heater therebetween. The heater includes multiple heating elements provided in multiple heating zones of the heating unit. ## Claims ### Claim 1 A substrate liquid processing apparatus configured to perform a liquid processing on a processing surface of a substrate with a processing liquid, the substrate liquid processing apparatus comprising: a substrate holder configured to hold the substrate; a processing liquid supply configured to supply the processing liquid onto the processing surface of the substrate held by the substrate holder; and a heating unit configured to heat the processing liquid on the processing surface, wherein the heating unit comprises a heater, and a first sheet-shaped body and a second sheet-shaped body which are disposed to face the heater therebetween, the first sheet-shaped body is disposed between the heater and the processing surface, the heater comprises multiple heating elements provided in multiple heating zones of the heating unit, and at least one of the first sheet-shaped body or the second sheet-shaped body has a groove thereon, and the groove, formed on the at least one of the first sheet-shaped body or the second sheet-shaped body, is provided at a region corresponding to a boundary between neighboring heating zones among the multiple heating zones. ### Claim 2 (depends on 1) The substrate liquid processing apparatus of claim 1, wherein the groove is provided at the first sheet-shaped body. ### Claim 3 (depends on 2) The substrate liquid processing apparatus of claim 2, wherein the groove provided at the first sheet-shaped body is formed completely through the first sheet-shaped body. ### Claim 4 (depends on 3) The substrate liquid processing apparatus of claim 3, further comprising: a filling member disposed in the groove provided at the first sheet-shaped body. ### Claim 5 (depends on 1) The substrate liquid processing apparatus of claim 1, wherein the groove is opened in a direction toward the heater. ### Claim 6 (depends on 1) The substrate liquid processing apparatus of claim 1, wherein the groove is opened in a direction distanced away from the heater. ### Claim 7 (depends on 1) The substrate liquid processing apparatus of claim 1, wherein the groove includes multiple grooves, and the multiple grooves are provided at the region corresponding to the boundary between the neighboring heating zones. ### Claim 8 (depends on 1) The substrate liquid processing apparatus of claim 1, wherein the heater comprises a supporting plate configured to support the multiple heating elements, and the supporting plate is formed of mica. ### Claim 9 (depends on 1) The substrate liquid processing apparatus of claim 1, wherein a distance between the first sheet-shaped body and the processing surface is set to be different between at least two heating zones among the multiple heating zones.