# US 11,440,318 B2 · Coating liquid composition for forming piezoelectric film, oriented piezoelectric film, and liquid ejection head

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- Number: US 11,440,318 B2
- Document ID: US11440318B2
- Status: Granted
- Kind: B2
- Application number: 16/589,582
- Filed: 2019-10-01
- Published: 2020-04-09
- Granted: 2022-09-13
- Earliest claimed: 2018-10-03
- Assignees: Canon Kabushiki Kaisha
- Applicants: Canon Kabushiki Kaisha
- Inventors: Yoshinori Kotani; Motokazu Kobayashi; Yoshihiro Ohashi; Minako Nakasu
- Web page: https://patentgrep.com/patent/US11440318B2

## CPC

- B41J 2/14233: {of film type, deformed by bending and disposed on a diaphragm}
- B41J 2/161: {of film type, deformed by bending and disposed on a diaphragm}
- B41J 2/1623: {bonding and adhesion}
- B41J 2/1642: {thin film formation by CVD [chemical vapor deposition]}
- B41J 2/1645: {thin film formation by spincoating}
- B41J 2/1646: {thin film formation by sputtering}
- C04B 35/4686: {based on phases other than BaTiO3 perovskite phase}
- C04B 35/624: Sol-gel processing
- H10N 30/078: by sol-gel deposition
- H10N 30/081: by coating or depositing using masks, e.g. lift-off
- H10N 30/704: {based on piezoelectric or electrostrictive films or coatings}
- H10N 30/8536: {Alkaline earth metal based oxides, e.g. barium titanates}
- H10N 30/8542: {Alkali metal based oxides, e.g. lithium, sodium or potassium niobates}
- B41J 2002/14258: {Multi layer thin film type piezoelectric element}
- B41J 2202/03: Specific materials used
- C04B 2235/3236: Alkaline earth titanates
- C04B 2235/441: Alkoxides, e.g. methoxide, tert-butoxide
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- C04B: LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE {(roofing granules E04D7/005)}; CERAMICS (devitrified glass-ceramics C03C10/00); REFRACTORIES; TREATMENT OF NATURAL STONE
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

## Abstract

A sodium niobate-barium titanate-based coating liquid composition including: (a) a sol-gel raw material containing (i) a niobium component, such as a niobium alkoxide, (ii) a sodium component, such as a sodium alkoxide, (iii) a titanium component, such as a titanium alkoxide, and (iv) a barium component, such as a barium alkoxide; and (b) a compound including at least one kind selected from the group consisting of a β-ketoester compound and a β-diketone compound represented by the following formula (1): where R1 represents an alkyl group having 1 or more to 6 or less carbon atoms.

## Claims

### Claim 1

A sodium niobate-barium titanate-based coating liquid composition comprising:
(a) a sol-gel raw material containing:
(i) at least one kind of niobium component selected from the group consisting of a niobium alkoxide, a hydrolysate of the niobium alkoxide, and a condensate of the hydrolysate of the niobium alkoxide;
(ii) at least one kind of sodium component selected from the group consisting of a sodium alkoxide, a hydrolysate of the sodium alkoxide, and a condensate of the hydrolysate of the sodium alkoxide;
(iii) at least one kind of titanium component selected from the group consisting of a titanium alkoxide, a hydrolysate of the titanium alkoxide, and a condensate of the hydrolysate of the titanium alkoxide; and
(iv) at least one kind of barium component selected from the group consisting of a barium alkoxide, a hydrolysate of the barium alkoxide, and a condensate of the hydrolysate of the barium alkoxide; and
(b) a compound including at least one member selected from the group consisting of a β-ketoester compound and a β-diketone compound represented by the following formula (1):
where R1 represents an alkyl group having 1 or more to 6 or less carbon atoms.

### Claim 2 (depends on 1)

The sodium niobate-barium titanate-based coating liquid composition according to claim 1, further comprising an alkoxide precursor in which the β-ketoester compound or the β-diketone compound coordinates to form a chelate with at least one member selected from the group consisting of the niobium alkoxide, the sodium alkoxide, the titanium alkoxide, and the barium alkoxide.

### Claim 3 (depends on 2)

The sodium niobate-barium titanate-based coating liquid composition according to claim 2, wherein the compound (b) is dissolved in at least one organic solvent selected from the group consisting of an alcohol and a carboxylic acid.

### Claim 4 (depends on 1)

The sodium niobate-barium titanate-based coating liquid composition according to claim 1, wherein the compound (b) is dissolved in at least one organic solvent selected from the group consisting of an alcohol and a carboxylic acid.

### Claim 5

A liquid ejection head comprising:
a liquid ejection orifice;
a pressure chamber communicating with the liquid ejection orifice; and
an actuator configured to cause a capacity change for ejecting a liquid from the liquid ejection orifice to the pressure chamber,
wherein the actuator includes:
a vibrating plate;
a sodium niobate-barium titanate-based piezoelectric film comprising a perovskite crystal that has a crystal axis oriented in a normal direction of a film surface, and that is represented by the following general formula (2):
(1−x)NaNbO3-xBaTiO3 (0.01≤x≤0.40) (2);
an upper electrode; and
a lower electrode located between the vibrating plate and the sodium niobate-barium titanate-based piezoelectric film, and
wherein the vibrating plate, the sodium niobate-barium titanate-based piezoelectric film, and the upper electrode are arranged in this order from a pressure chamber side.