# US 11,439,838 B2 · Neural probe structure for measuring multiple fluorescence signals and manufacturing method thereof > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,439,838 B2 - Document ID: US11439838B2 - Status: Granted - Kind: B2 - Application number: 16/894,887 - Filed: 2020-06-08 - Published: 2021-03-25 - Granted: 2022-09-13 - Earliest claimed: 2019-09-19 - Assignees: Korea Institute of Science and Technology - Applicants: Korea Institute of Science and Technology - Inventors: Il-Joo Cho; Namsun Chou - Web page: https://patentgrep.com/patent/US11439838B2 ## CPC - A61B 5/0071: {by measuring fluorescence emission} - A61N 5/0622: {Optical stimulation for exciting neural tissue} - A61B 5/0084: {for introduction into the body, e.g. by catheters (A61B5/1459 takes precedence)} - A61B 5/24: Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof - A61B 5/294: for nerve conduction study [NCS] - A61B 5/4064: {Evaluating the brain (for intracranial pressure A61B5/031; for cerebral blood gases A61B5/14553; using EEG A61B5/369)} - A61B 5/6848: {Needles} - A61N 5/0601: {Apparatus for use inside the body} - A61B 2562/0233: Special features of optical sensors or probes classified in A61B5/00 - A61B 2562/046: in a matrix array - A61N 2005/0612: {using probes penetrating tissue; interstitial probes} - A61N 2005/063: {comprising light transmitting means, e.g. optical fibres} - A61N 2005/0651: {Diodes} - A61N 2005/0667: {Filters} - A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D) - A61N: ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY (measurement of bioelectric currents A61B; surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body A61B18/00; anaesthetic apparatus in general A61M; incandescent lamps H01K; infrared radiators for heating H05B) ## Abstract A neural probe structure includes a probe that is inserted into a subject, a body to support a rear end of the probe, at least one light source included in the body, a photo diode formed in the probe, and an optical waveguide extending from the at least one light source in the body to the photo diode of the probe, wherein the photo diode is formed at a smaller height than the optical waveguide. ## Claims ### Claim 1 A neural probe structure, comprising: a probe configured to be inserted into a subject; a body which supports a rear end of the probe; at least one light source included in the body; a photo diode formed in the probe; a plurality of electrodes formed in the probe; and an optical waveguide extending from the at least one light source in the body to the photo diode of the probe, wherein the photo diode includes p+ layer and n+ layer, and an insulating layer is further disposed under the plurality of electrodes and above the p+ layer and n+ layer of the photo diode. ### Claim 2 (depends on 1) The neural probe structure according to claim 1, further comprising: an optical filter on the photo diode. ### Claim 3 (depends on 1) The neural probe structure according to claim 1, wherein when the body includes a plurality of light sources, the optical waveguide is formed such that a plurality of branches each extends from the plurality of light sources, the branches are combined into one strand at a point, and the strand extends to the photo diode. ### Claim 4 (depends on 1) The neural probe structure according to claim 1, wherein the photo diode is formed in a concave shape inwards from an upper surface of the probe to prevent the photo diode from protruding above the upper surface of the probe. ### Claim 5 (depends on 1) The neural probe structure according to claim 1, wherein the photo diode measures a fluorescence signal emitted from a neuron by light transmitted from the at least one light source through the optical waveguide, and the plurality of electrodes is arranged near the photo diode to measure an electrical neural signal of the neuron. ### Claim 6 (depends on 1) A method for manufacturing a neural probe structure defined in claim 1, the method comprising: forming the photo diode in a substrate that constitutes the probe; and forming the optical waveguide at a larger height than the photo diode along a longitudinal axis from the photo diode. ### Claim 7 (depends on 6) The method for manufacturing a neural probe structure according to claim 6, further comprising: forming an optical filter on the photo diode. ### Claim 8 (depends on 6) The method for manufacturing a neural probe structure according to claim 6, wherein forming the optical waveguide comprises, when the body includes a plurality of light sources, forming the optical waveguide such that a plurality of branches each extends from the plurality of light sources, the branches are combined into one strand at a point, and the strand extends to the photo diode. ### Claim 9 (depends on 6) The method for manufacturing a neural probe structure according to claim 6, wherein forming the photo diode in the substrate comprises forming the photo diode in a silicon substrate based on a complementary metal-oxide semiconductor (CMOS) process. ### Claim 10 (depends on 6) The method for manufacturing a neural probe structure according to claim 6, wherein forming the photo diode in the substrate comprises forming the photo diode in the substrate into a concave shape inwards from an upper surface of the probe to prevent the photo diode from protruding above the upper surface of the probe. ### Claim 11 (depends on 6) The method for manufacturing a neural probe structure according to claim 6, further comprising: forming a plurality of electrodes at locations a predetermined distance away from two sides along a latitudinal axis from the photo diode.