# US 11,439,822 B2 · Polymer-based optoelectronic interface and methods for its manufacture > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,439,822 B2 - Document ID: US11439822B2 - Status: Granted - Kind: B2 - Application number: 16/499,106 - Filed: 2017-03-31 - Published: 2021-03-25 - Granted: 2022-09-13 - Earliest claimed: 2017-03-31 - Assignees: Ecole Polytechnique Federale de Lausanne - Applicants: Ecole Polytechnique Fédérale de Lausanne (EPFL) - Inventors: Diego Ghezzi; Marta Jole Ildelfonsa Airaghi Leccardi; Laura Ferlauto - Web page: https://patentgrep.com/patent/US11439822B2 ## CPC - A61N 1/0543: {Retinal electrodes} - A61N 1/36046: {of the eye} - A61N 1/375: Constructional arrangements, e.g. casings - H10K 39/30: Devices controlled by radiation - H10K 39/32: Organic image sensors - H10F 39/80: {Constructional details of image sensors} - H10K 30/80: Constructional details - A61N: ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY (measurement of bioelectric currents A61B; surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body A61B18/00; anaesthetic apparatus in general A61M; incandescent lamps H01K; infrared radiators for heating H05B) - H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES - H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION ## Abstract A polymer-based optoelectronic interface comprises an elastomeric substrate (10) and a plurality of discrete photovoltaic pixel elements (20) disposed on top of the substrate. Each pixel element comprises at least one active layer comprising a semiconducting polymer or polymer mixture. The pixel elements are excitable by light to generate an electric signal via a photovoltaic process. For mechanically protecting the pixel elements, an elastomeric encapsulation layer (30) can be disposed on top of the substrate, the encapsulation layer defining access openings (31) for the pixel elements (20). Pillar-like structures (40) can be disposed on the pixel elements. Methods for fabricating such an optoelectronic interface are also disclosed. The optoelectronic interface can be used as a retinal prosthesis. ## Claims ### Claim 1 A polymer-based optoelectronic interface comprising: an elastomeric substrate; and a plurality of discrete photovoltaic pixel elements disposed on top of the elastomeric substrate, each photovoltaic pixel element being excitable by light to generate an electric signal via a photovoltaic process, each photovoltaic pixel element comprising: at least one active layer comprising a semiconducting polymer or polymer mixture, the at least one active layer being patterned such that the at least one active layer of each discrete photovoltaic pixel element is separate from the at least one active layer of any other discrete adjacent photovoltaic pixel element of the optoelectronic interface; an electrically conducting base layer disposed between the elastomeric substrate and the active layer, the base layer being patterned such that the base layer of each discrete photovoltaic pixel element is separate from the base layer of any other photovoltaic pixel element of the optoelectronic interface. ### Claim 2 (depends on 1) The optoelectronic interface of claim 1, wherein the elastomeric substrate and the electrically conducting base layer are transparent or translucent. ### Claim 3 (depends on 1) The optoelectronic interface of claim 1, wherein the electrically conducting base layer comprises at least one conducting polymer. ### Claim 4 (depends on 1) The optoelectronic interface of claim 1, wherein each photovoltaic pixel element comprises an electrically conducting contact layer on top of at least a portion of the active layer. ### Claim 5 (depends on 1) The optoelectronic interface of claim 1, further comprising: an elastomeric encapsulation layer, the elastomeric encapsulation layer being disposed on top of the elastomeric substrate and the photovoltaic pixel elements, the elastomeric encapsulation layer defining access openings, each access opening extending from one of the photovoltaic pixel elements to an outer surface of the elastomeric encapsulation layer. ### Claim 6 (depends on 5) The optoelectronic interface of claim 5, wherein the elastomeric encapsulation layer overlaps at least some of the photovoltaic pixel elements at least in a border area of the respective photovoltaic pixel element. ### Claim 7 (depends on 5) The optoelectronic interface of claim 5, comprising pillar-like structures, each pillar-like structure being disposed on top of one of the photovoltaic pixel elements, each pillar-like structure being at least partially surrounded by one of the access openings. ### Claim 8 (depends on 7) The optoelectronic interface of claim 7, wherein the pillar-like structures are made of the same material as the elastomeric encapsulation layer. ### Claim 9 (depends on 7) The optoelectronic interface of claim 7, wherein the pillar-like structures axially extend to an outer surface of the elastomeric encapsulation layer. ### Claim 10 (depends on 7) The optoelectronic interface of claim 7, wherein at least some of the photovoltaic pixel elements comprise an electrode layer that at least partially covers the respective pillar-like structure and a portion of the associated photovoltaic pixel element that is not covered by the pillar-like structure. ### Claim 11 (depends on 7) The optoelectronic interface of claim 7, wherein the pillar-like structures axially protrude beyond the elastomeric encapsulation layer. ### Claim 12 (depends on 1) The optoelectronic interface of claim 1, comprising rigid platforms embedded in the substrate, each pixel element being arranged above one of the rigid platforms. ### Claim 13 (depends on 12) The optoelectronic interface of claim 12, wherein each photovoltaic pixel element has a diameter that is at most 95% of the diameter of the rigid platform that is arranged below the respective photovoltaic pixel element. ### Claim 14 An optoelectronic device comprising: a curved or domed support; and an optoelectronic interface, the optoelectronic interface being bonded to the support, the optoelectronic interface being polymer-based, the optoelectronic interface comprising: an elastomeric substrate; and a plurality of discrete photovoltaic pixel elements disposed on top of the elastomeric substrate, each photovoltaic pixel element being excitable by light to generate an electric signal via a photovoltaic process, each photovoltaic pixel element comprising: at least one active layer comprising a semiconducting polymer or polymer mixture, the at least one active layer being patterned such that the at least one active layer of each discrete photovoltaic pixel element is separate from the at least one active layer of any other discrete adjacent photovoltaic pixel element of the optoelectronic interface; and an electrically conducting base layer disposed between the elastomeric substrate and the active layer, the base layer being patterned such that the base layer of each discrete photovoltaic pixel element is separate from the base layer of any other photovoltaic pixel element of the optoelectronic interface. ### Claim 15 (depends on 14) The optoelectronic device of claim 14, wherein the optoelectronic device is configured as an injectable, self-opening and freestanding retinal prosthesis. ### Claim 16 A method of manufacturing a polymer-based optoelectronic interface, the method comprising: providing an elastomeric substrate; and creating a plurality of discrete photovoltaic pixel elements on top of said elastomeric substrate, each photovoltaic pixel element being excitable by light to generate an electric signal via a photovoltaic process, each photovoltaic pixel element comprising: at least one active layer comprising a semiconducting polymer or polymer mixture, the at least one active layer being patterned such that the at least one active layer of each discrete photovoltaic pixel element is separate from the at least one active layer of any other discrete adjacent photovoltaic pixel element of the optoelectronic interface; and an electrically conducting base layer disposed between the elastomeric substrate and the active layer, the base layer being patterned such that the base layer of each discrete photovoltaic pixel element is separate from the base layer of any other photovoltaic pixel element of the optoelectronic interface. ### Claim 17 (depends on 16) The method of claim 16, further comprising: disposing an elastomeric encapsulation layer on top of both the elastomeric substrate and the photovoltaic pixel elements, and creating access openings in the elastomeric encapsulation layer, each access opening exposing a portion of one of the photovoltaic pixel elements. ### Claim 18 (depends on 17) The method of claim 17, wherein the access openings are created in such a manner that the elastomeric encapsulation layer overlaps at least some of the photovoltaic pixel elements at least in a border area of the respective photovoltaic pixel element. ### Claim 19 (depends on 17) The method of claim 17, wherein the access openings are created in the elastomeric encapsulation layer by a photolithographic etching method. ### Claim 20 (depends on 19) The method of claim 19, wherein creating the access openings comprises: disposing an adhesion layer on the elastomeric encapsulation layer; disposing a photoresist layer on the adhesion layer; photolithographically patterning a portion of the photoresist layer to expose a portion of the adhesion layer; removing the exposed portion of the adhesion layer to expose a portion of the elastomeric encapsulation layer; and removing the exposed portion of the elastomeric encapsulation layer to create the access openings. ### Claim 21 (depends on 17) The method of claim 17, wherein the access openings are created in such a manner that pillar-like structures are formed by portions of the elastomeric encapsulation layer, each pillar-like structure being disposed on top of one of the photovoltaic pixel elements, each pillar-like structure being at least partially surrounded by one of the access openings. ### Claim 22 (depends on 21) The method of claim 21, further comprising: reducing a thickness of the elastomeric encapsulation layer outside the pillar-like structures such that the pillar-like structures axially protrude beyond the elastomeric encapsulation layer. ### Claim 23 (depends on 21) The method of claim 21, further comprising: disposing an electrode layer onto the pillar-like structures and onto the exposed portions of the photovoltaic pixel elements. ### Claim 24 (depends on 16) The method of claim 16, further comprising bonding the optoelectronic interface to a curved or domed support. ### Claim 25 An injectable, self-opening and freestanding retinal prosthesis comprising: a curved or domed support; and a polymer-based optoelectronic interface bonded to the support, the optoelectronic interface comprising: an elastomeric substrate; and a plurality of discrete photovoltaic pixel elements disposed on top of the substrate, each photovoltaic pixel element being excitable by light to generate an electric signal via a photovoltaic process, each photovoltaic pixel element facing away from the support and comprising: at least one active layer comprising a semiconducting polymer or polymer mixture, the at least one active layer being patterned such that the at least one active layer of each discrete photovoltaic pixel element is separate from the at least one active layer of any other discrete adjacent photovoltaic pixel element of the optoelectronic interface; an electrically conducting base layer disposed between the substrate and the active layer, the base layer comprising at least one conducting polymer, the base layer being patterned such that the base layer of each discrete photovoltaic pixel element is separate from the base layer of any other photovoltaic pixel element of the optoelectronic interface; and an electrically conducting contact layer on top of at least a portion of the active layer such that illumination of the pixel element causes a voltage to develop between the base layer and the contact layer, the contact layer being configured to provide electric contact between the pixel element and a target tissue when the retinal prosthesis is implanted, the contact layer being patterned such that the contact layer of each discrete photovoltaic pixel element is separate from the contact layer of any other photovoltaic pixel element of the optoelectronic interface. ### Claim 26 (depends on 25) The retinal prosthesis of claim 25, wherein the optoelectronic interface comprises an elastomeric encapsulation layer, the encapsulation layer being disposed on top of the substrate and the pixel elements, the encapsulation layer defining access openings, each access opening extending from one of the pixel elements to an outer surface of the encapsulation layer. ### Claim 27 (depends on 26) The retinal prosthesis of claim 26, wherein the encapsulation layer overlaps at least some of the pixel elements at least in a border area of the respective pixel element. ### Claim 28 An injectable, self-opening and freestanding retinal prosthesis comprising: a curved or domed support; and a polymer-based optoelectronic interface bonded to the support, the optoelectronic interface comprising: an elastomeric substrate; and a plurality of discrete photovoltaic pixel elements disposed on top of the substrate, each pixel element facing away from the support and comprising at least one active layer comprising a semiconducting polymer or polymer mixture, each pixel element being excitable by light to generate an electric signal via a photovoltaic process; and an elastomeric encapsulation layer, the encapsulation layer being disposed on top of the substrate and the pixel elements, the encapsulation layer defining access openings, each access opening extending from one of the pixel elements to an outer surface of the encapsulation layer; and pillar-like structures, each pillar-like structure being disposed on top of one of the pixel elements, each pillar-like structure being at least partially surrounded by one of the access openings, wherein at least some of the pixel elements comprise an electrode layer that at least partially covers the respective pillar-like structure and a portion of the associated pixel element that is not covered by the pillar-like structure, the electrode layer being configured to provide electric contact between the pixel element and a target tissue when the retinal prosthesis is implanted. ### Claim 29 (depends on 28) The retinal prosthesis of claim 28, wherein each pixel element comprises an electrically conducting base layer disposed between the substrate and the active layer, the base layer comprising at least one conducting polymer. ### Claim 30 (depends on 29) The retinal prosthesis of claim 29, wherein the base layer of each discrete photovoltaic pixel element is patterned such that the base layer of each discrete photovoltaic pixel element is separate from the base layer of any other photovoltaic pixel element of the optoelectronic interface. ### Claim 31 (depends on 28) The retinal prosthesis of claim 28, wherein the pillar-like structures are made of the same material as the encapsulation layer. ### Claim 32 (depends on 28) The retinal prosthesis of claim 28, wherein the pillar-like structures axially extend to an outer surface of the encapsulation layer or axially protrude beyond the encapsulation layer. ### Claim 33 (depends on 28) The retinal prosthesis of claim 28, wherein the encapsulation layer overlaps at least some of the pixel elements at least in a border area of the respective pixel element. ### Claim 34 (depends on 28) The retinal prosthesis of claim 28, wherein the at least one active layer of each discrete photovoltaic pixel element is patterned such that the at least one active layer of each discrete photovoltaic pixel element is separate from the at least one active layer of any other photovoltaic pixel element of the optoelectronic interface; and wherein the electrode layer of each discrete photovoltaic pixel element is patterned such that the electrode layer of each discrete photovoltaic pixel element is separate from the electrode layer of any other photovoltaic pixel element of the optoelectronic interface. ### Claim 35 A polymer-based optoelectronic interface comprising: an elastomeric substrate; a plurality of discrete photovoltaic pixel elements disposed on top of the elastomeric substrate, each photovoltaic pixel element being excitable by light to generate an electric signal via a photovoltaic process, each photovoltaic pixel element comprising at least one active layer comprising a semiconducting polymer or polymer mixture, the at least one active layer being patterned such that the at least one active layer of each discrete photovoltaic pixel element is separate from the at least one active layer of any other discrete adjacent photovoltaic pixel element of the optoelectronic interface; and an elastomeric encapsulation layer, the elastomeric encapsulation layer being disposed on top of the elastomeric substrate and the photovoltaic pixel elements, the elastomeric encapsulation layer defining access openings, each access opening extending from one of the photovoltaic pixel elements to an outer surface of the elastomeric encapsulation layer; and pillar-like structures, each pillar-like structure being disposed on top of one of the photovoltaic pixel elements, each pillar-like structure being at least partially surrounded by one of the access openings, wherein the pillar-like structures are made of the same material as the elastomeric encapsulation layer. ### Claim 36 A polymer-based optoelectronic interface comprising: an elastomeric substrate; a plurality of discrete photovoltaic pixel elements disposed on top of the elastomeric substrate, each photovoltaic pixel element being excitable by light to generate an electric signal via a photovoltaic process, each photovoltaic pixel element comprising at least one active layer comprising a semiconducting polymer or polymer mixture, the at least one active layer being patterned such that the at least one active layer of each discrete photovoltaic pixel element is separate from the at least one active layer of any other discrete adjacent photovoltaic pixel element of the optoelectronic interface; and an elastomeric encapsulation layer, the elastomeric encapsulation layer being disposed on top of the elastomeric substrate and the photovoltaic pixel elements, the elastomeric encapsulation layer defining access openings, each access opening extending from one of the photovoltaic pixel elements to an outer surface of the elastomeric encapsulation layer; and pillar-like structures, each pillar-like structure being disposed on top of one of the photovoltaic pixel elements, each pillar-like structure being at least partially surrounded by one of the access openings, wherein at least some of the photovoltaic pixel elements comprise an electrode layer that at least partially covers the respective pillar-like structure and a portion of the associated photovoltaic pixel element that is not covered by the pillar-like structure.