Sequencer time leaping execution
AssigneeApplied Materials, Inc.
InventorChongyang Wang
Life of this patent
Estimating the term…
Abstract
A method includes receiving a plurality of operations in a sequence recipe. The plurality of operations are associated with processing a plurality of substrates in a substrate processing system. The method further includes identifying a plurality of completion times corresponding to the plurality of operations. Each completion time of the plurality of completion times corresponds to completion of a respective operation of the plurality of operations. The method further includes simulating the plurality of operations by setting a virtual time axis to each of the plurality of completion times to generate a schedule for the sequence recipe. The method further includes causing, based on the schedule, the plurality of substrates to be processed or performance of a corrective action.
Claims17
A method comprising:
- receiving, by a processing system comprising a memory and a processing device, a plurality of operations in a sequence recipe, wherein the plurality of operations are associated with processing a plurality of substrates in a substrate processing system;
- determining, by the processing system based on the sequence recipe and historical timings, a plurality of completion times corresponding to the plurality of operations, wherein each completion time of the plurality of completion times corresponds to completion of a respective operation of the plurality of operations;
- simulating, by the processing system, the plurality of operations by setting a virtual time axis to each of the plurality of completion times to generate a schedule for the sequence recipe, wherein the simulating of the plurality of operations comprises:
- generating a queue of the plurality of operations;
- sorting the plurality of operations in the queue based on the plurality of completion times;
- and
- for each operation of the plurality of operations in the queue, obtaining a next operation in the queue and setting the virtual time axis to time leap to a corresponding completion time of the next operation until each operation of the plurality of operations in the queue are completed;
- and
- causing, by the processing system based on the schedule, the plurality of substrates to be processed or performance of a corrective action.
A non-transitory machine-readable storage medium storing instructions which, when executed cause a processing system comprising a memory and a processing device to:
- receive a plurality of operations in a sequence recipe, wherein the plurality of operations are associated with processing a plurality of substrates in a substrate processing system;
- determine, based on the sequence recipe and historical timings, a plurality of completion times corresponding to the plurality of operations, wherein each completion time of the plurality of completion times corresponds to completion of a respective operation of the plurality of operations;
- simulate the plurality of operations by setting a virtual time axis to each of the plurality of completion times to generate a schedule for the sequence recipe, wherein to simulate the plurality of operations, the processing system is to:
- generate a queue of the plurality of operations;
- sort the plurality of operations in the queue based on the plurality of completion times;
- and
- for each operation of the plurality of operations in the queue, obtain a next operation in the queue and set the virtual time axis to time leap to a corresponding completion time of the next operation until each operation of the plurality of operations in the queue are completed;
- and
- cause, based on the schedule, the plurality of substrates to be processed or performance of a corrective action.
A system comprising:
- memory;
- and
- a processing device coupled to the memory, the processing device to:
- receive a plurality of operations in a sequence recipe, wherein the plurality of operations are associated with processing a plurality of substrates in a substrate processing system;
- determine, based on the sequence recipe and historical timings, a plurality of completion times corresponding to the plurality of operations, wherein each completion time of the plurality of completion times corresponds to completion of a respective operation of the plurality of operations;
- simulate the plurality of operations by setting a virtual time axis to each of the plurality of completion times to generate a schedule for the sequence recipe, wherein to simulate the plurality of operations, the processing device is to:
- generate a queue of the plurality of operations;
- sort the plurality of operations in the queue based on the plurality of completion times;
- and
- for each operation of the plurality of operations in the queue, obtain a next operation in the queue and set the virtual time axis to time leap to a corresponding completion time of the next operation until each operation of the plurality of operations in the queue are completed;
- and
- cause, based on the schedule, the plurality of substrates to be processed or performance of a corrective action.
Dependencies are inferred from the claim text.