Microblower
AssigneeBartels Mikrotechnik GmbH
InventorsFrank Bartels, Anja Strube, Florian Siemenroth
Life of this patent
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Abstract
A micropump and its use, the micropump including a vibration unit with piezo actuator, which is arranged on an vibration diaphragm, a vibration plate arranged opposite the vibration diaphragm and having a blower opening, as well as a wall arranged between the vibration diaphragm and the vibration plate, so that a blower chamber is formed, and a housing, in which the vibration unit is mounted, with an suction opening, as well as an output opening, which lies opposite the blower opening. The housing forms a closed space and has at least one suction opening arranged radially, or on an underside opposite the vibration unit, with a suction channel leading into a pump chamber located between the vibration plate and the inside of the housing.
Claims12
A micropump for compressible fluids, the micropump comprising:
- a vibration unit (10) comprising a disk-shaped piezo actuator (11) disposed on a vibration diaphragm (12), and a vibration plate (15) disposed on a side of the vibration diaphragm (12) that is opposite the piezo actuator (11), the vibration plate (15) having a blower opening (16) at its center and a circumferential wall connecting the vibration diaphragm (12) to the vibration plate (15) in a gas-tight manner so as to form a blower chamber (13);
- and
- a housing (20) in which the vibration unit (10) can be completely accommodated and in which it is oscillatingly mounted by means of at least one suspension (17), the housing (20) having a suction opening (24), as well as an output opening (25) which lies opposite the blower opening (16);
- characterized in that the housing (20):
- forms a closed half-space (H) covering the piezo actuator (11) to prevent exposure of the piezo actuator (11) to an environment outside of the micropump, and
- comprises a pump chamber (26) located on a side of the vibration plate (15) that is opposite the vibrating diaphragm (12) and which is fluidly connected to the suction opening (24) and the output opening (25) on a same plane,
- so that during oscillating operation of the piezo actuator (11) the vibration unit (10) is set to oscillate relative to the housing (20), whereby the compressible fluid can be sucked in through the suction opening (24) and discharged through the output opening (25), wherein the compressible fluid is prevented from contacting the piezo actuator (11).
Dependencies are inferred from the claim text.