Methods for manufacturing micromechanical components and method for manufacturing a mould insert component
AssigneeCsem Centre Suisse D'Electronique Et De Microtechnique SA—Recherche Et DéVeloppement
InventorsNicolas Blondiaux, Raphaël Pugin
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Abstract
Method of manufacturing a micromechanical component intended to cooperate with another micromechanical component, the method comprising the steps of providing a substrate, forming a mould on said substrate, said mould defining sidewalls arranged to delimit said micromechanical component, providing particles on at least said sidewalls, depositing a metal in said mould so as to form said micromechanical component, and liberating said micromechanical component from said mould and removing said particles.
Claims22
A method of manufacturing a micromechanical component intended to interact with another micromechanical component via a frictional contact, comprising the steps of:
- providing a substrate;
- subsequently
- forming a mould on said substrate, said mould defining sidewalls arranged to delimit said micromechanical component;
- subsequently
- providing particles on at least said sidewalls;
- subsequently
- depositing a metal in said mould so as to form said micromechanical component;
- subsequently
- liberating said micromechanical component from said mould and removing said particles.
A method of manufacturing a mould insert component adapted for the manufacture of a micromechanical component by moulding, said micromechanical component being intended to cooperate with another micromechanical component via frictional contact, said method comprising the steps of:
- providing a substrate;
- subsequently
- forming a mould on said substrate, said mould defining sidewalls arranged to delimit said mould insert;
- subsequently
- providing particles on at least said sidewalls;
- subsequently
- depositing a metal in said mould so as to form said mould insert component;
- subsequently
- liberating said mould insert component from said mould and removing said particles.
Dependencies are inferred from the claim text.