Conveying device for conveying at least one wafer

A conveying device for conveying at least one wafer, comprising:

• at least one transport body configured at least to carry or hold the at least one wafer;
• and
• a stator, relative to which the conveying device is configured to convey the at least one transport body at least two-dimensionally on a conveying surface in controlled fashion, wherein:
• the at least one transport body comprises several movably arranged actuating magnets, each of which is connected to the transport body via an actuating element, wherein the actuating element is configured to change a position and/or an orientation of the connected actuating magnet relative to the transport body in controlled fashion;
• the stator comprises at least two stationary magnets which are connected to the stator such that the at least two stationary magnets are immovable relative to the stator;
• the at least one transport body and the stator are magnetically coupled by means of the at least two stationary magnets and the several actuating magnets;
• and
• the conveying device is configured to convey the at least one transport body relative to the stator by controlled positioning and/or orientation of the several actuating magnets by means of the actuating elements.

A method for operating a conveying device, comprising:

• freely moving at least one transport body, which is configured to carry or hold at least one wafer, on a conveying surface into a desired position and/or orientation with the conveying device, which is configured to move the at least one transport body at least two-dimensionally on the conveying surface using a stator, relative to which the conveying device is configured to convey the at least one transport body in controlled fashion, wherein:
• one of the at least one transport body and the stator comprises several movably arranged actuating magnets, each of which is connected to the one of the at least one transport body and the stator via an actuating element, wherein the actuating element is configured to change a position and/or an orientation of the connected actuating magnet relative to the at least one transport body and the stator in controlled fashion;
• the other of the at least one transport body and the stator comprises at least two stationary magnets which are connected to the other of the at least one transport body and the stator such that the at least two stationary magnets are immovable relative to the other of the at least one transport body and the stator;
• the at least one transport body and the stator are magnetically coupled by means of the at least two stationary magnets and the several actuating magnets;
• and
• the conveying device is configured to freely move the at least one transport body relative to the stator by controlled positioning and/or orientation of the several actuating magnets by means of the actuating elements.