Method and system for generating reciprocal space map
AssigneeFEI Company
InventorsAndrew Barnum, Mark J. Williamson
Life of this patent
Estimating the term…
Abstract
Reciprocal space map of specific sample locations is generated based on the sample images acquired by irradiating the sample with a charged particle beam at multiple incident angles. The incident angles are obtained by tilting the charged particle beam and/or the sample around two perpendicular axes within the sample plane. The reciprocal space map of a selected sample location is generated based on intensity of pixels corresponding to the location in the sample images.
Claims20
A method for imaging a sample with a charged particle microscopy system, comprising:
- irradiating a charged particle beam towards the sample at multiple incident angles by tilting the charged particle beam relative to the sample around two perpendicular axes in a sample plane;
- forming multiple sample images, wherein each of the multiple sample image is generated responsive to irradiating the sample at one of the multiple incident angles;
- selecting a region of interest (ROI) of the sample;
- and
- generating a reciprocal space map for mapping a reciprocal space of the selected ROI based on intensity of pixels corresponding to the ROI in the multiple sample images.
A method for imaging a sample with a charged particle microscopy system, comprising:
- directing a parallel charged particle beam towards the sample at a first incident angle, and acquiring a first sample image based on scattered charged particles from the sample;
- selecting a region of interest (ROI) of the sample;
- generating a reciprocal space map for mapping a reciprocal space a of the selected ROI based on intensity of pixels corresponding to the ROI in the first sample image;
- adjusting the incident angle of the charged particle beam to a second incident angle by tilting the incident angle around one of two perpendicular axes in a sample plane;
- directing the charged particle beam towards the sample at the second incident angle, and acquiring a second sample image based on the scattered charged particles from the sample;
- and
- updating the reciprocal space map of the selected ROI based on intensity of pixels corresponding to the ROI in the second sample image.
A charged particle microscopy system, comprising:
- a source for generating a parallel charged particle beam along a primary axis;
- a stage for holding a sample;
- a controller including non-transitory memory for storing computer readable instructions, by executing the computer readable instructions, the controller is configured to:
- irradiate the parallel charged particle beam towards the sample at multiple incident angles by tilting the charged particle beam relative to the sample around two axes in a sample plane, where the two axes are perpendicular to each other, and the sample plane is perpendicular to the primary axis;
- form multiple sample images, wherein each of the multiple sample image is generated responsive to irradiating the sample at one of the multiple incident angles;
- select a region of interest (ROI) of the sample;
- and
- generate a reciprocal space map for mapping a reciprocal space of the selected ROI based on intensity of pixels corresponding to the ROI in the multiple sample images.
Dependencies are inferred from the claim text.