Electron source operating method
Assignee38th Research Institute, China Electronics Technology Group Corporation
InventorsHuarong Liu, Xueming Jin, Yuxuan Qi, Xuehui Wang, Yijing Li, Junting Wang, Chunning Zheng, Qing Qian, Tingting Luo, Zhonglin Dong
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Abstract
The present disclosure provides an electron source operating method, the electron source including at least one emission site fixed on a tip, the emission site being a reaction product formed by metal atoms of a surface of the tip and gas molecules under an electric field, and the operating method comprises emitting electrons by controlling operating parameters of the electron source.
Claims19
An electron source operating method which is applied for an electron source, the electron source is a field emission electron source comprising a tip and at least one emission site fixed on the tip, wherein the tip comprises a surface of the tip, wherein the emission site is a reaction product formed by metal atoms of the surface of the tip and gas molecules under an electric field, wherein the reaction is carried out without an ion bombardment, wherein the emission site is rooted on the surface of the tip, and wherein the electron source operating method comprises:
- emitting electrons by controlling operating parameters of the electron source,
- wherein the operating parameters of the electron source comprise an operating bias and one or more of an operating temperature or an operating pressure of an environment in which the electron source is located, and
- wherein the operating temperature is less than or equal to 1000 K and the operating pressure is less than or equal to 10−3 Pa, or the operating temperature is less than or equal to 150 K and the operating pressure is less than or equal to 1E−6 Pa, or the operating temperature is less than or equal to 800 K and greater than or equal to 500 K and the operating pressure is less than or equal to 1E−6 Pa.
Dependencies are inferred from the claim text.