Methods and systems for process control based on X-ray inspection

One or more computer-readable non-transitory storage media embodying software that is operable when executed to:

• capture one or more X-ray images with an X-ray inspection system for one or more samples of interest that have been processed by a first tool, wherein the X-ray inspection system is inline with the first tool, and wherein the X-ray inspection system has an inspection speed of 300 mm2 per minute or greater;
• determine, in real-time, metrology information related to the one or more samples of interest based on the one or more X-ray images, wherein the metrology information indicates that a sample parameter associated with the one or more samples of interest is outside of a pre-determined threshold range associated with the sample parameter;
• and
• provide, responsive to the real-time determination that the sample parameter is outside of the pre-determined threshold range, instructions or data to the first tool or one or more second tools to adjust one or more process parameters associated with the respective first tool and the one or more second tools based on the metrology information related to the one or more samples of interest, wherein the adjusted process parameters reduces a processing error probability, of the respective first tool and the one or more second tools for processing subsequent samples, related to the sample parameter being outside of the pre-determined threshold range.

A system comprising:

• one or more processors;
• and one or more computer-readable non-transitory storage media coupled to one or more of the processors and comprising instructions operable when executed by one or more of the processors to cause the system to:
• capture one or more X-ray images with an X-ray inspection system for one or more samples of interest that have been processed by a first tool, wherein the X-ray inspection system is inline with the first tool, and wherein the X-ray inspection system has an inspection speed of 300 mm2 per minute or greater;
• determine, in real-time, metrology information related to the one or more samples of interest based on the one or more X-ray images, wherein the metrology information indicates that a sample parameter associated with the one or more samples of interest is outside of a pre-determined threshold range associated with the sample parameter;
• and
• provide, responsive to the real-time determination that the sample parameter is outside of the pre-determined threshold range, instructions or data to the first tool or one or more second tools to adjust one or more process parameters associated with the respective first tool and the one or more second tools based on the metrology information related to the one or more samples of interest, wherein the adjusted process parameters reduces a processing error probability, of the respective first tool and the one or more second tools for processing subsequent samples, related to the sample parameter being outside of the pre-determined threshold range.