Scintillator module, scintillator sensor unit, and manufacturing method
AssigneeYMIT Co., Ltd.
InventorsFumiaki Kunimoto, Satomi Onishi
Life of this patent
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Abstract
A scintillator module includes a substrate, a columnar scintillator crystal layer formed on the substrate, and a non-adhesive moisture-proof member having a given hardness and opposing a crystal growing side of the columnar scintillator crystal layer. The moisture-proof member ensures a void between the moisture-proof member and individual conic peak portions of columnar scintillator crystals forming the columnar scintillator crystal layer under vacuum sealing, and holds the columnar scintillator crystal layer in a moisture-proof state between a moisture-proof layer and the substrate.
Claims7
A scintillator module, comprising:
- a substrate;
- a columnar scintillator crystal layer formed on the substrate;
- a non-adhesive moisture-proof member opposing a crystal growing side of the columnar scintillator crystal layer, and having a hardness to ensure, under a vacuum sealing, a void between the moisture-proof member and individual conic peak portions of columnar scintillator crystals forming the columnar scintillator crystal layer, to hold the columnar scintillator crystal layer in a moisture-proof state between the moisture-proof member and the substrate;
- and
- an adhesive seal member having a height to ensure the void and disposed on the substrate to surround the columnar scintillator crystal layer and support the moisture-proof member.
A manufacturing method of a scintillator module, the method comprising:
- forming a columnar scintillator crystal layer on a given substrate;
- placing an adhesive seal member on the substrate in such a manner that the seal member surrounds the columnar scintillator crystal layer, and allows the seal member to adhere to the substrate;
- placing the substrate and a non-adhesive moisture-proof member under a vacuum environment, the moisture-proof member having a hardness to ensure a void under a vacuum sealing;
- setting the moisture-proof member opposite the columnar scintillator crystal layer, and press-bonding the moisture-proof member to the substrate;
- and
- vacuum-sealing the moisture-proof member and the substrate while ensuring a void between the moisture-proof member and individual conic peak portions of columnar scintillator crystals forming the columnar scintillator crystal layer.
A manufacturing method of a scintillator sensor unit, the method comprising:
- forming a columnar scintillator crystal layer on a given substrate;
- placing an adhesive seal member on the substrate in such a manner that the adhesive seal member surrounds the columnar scintillator crystal layer and allows the adhesive seal member to adhere to the substrate;
- placing the substrate and a non-adhesive moisture-proof member under a vacuum environment, the moisture-proof member having a hardness to ensure a void under a vacuum sealing;
- setting the moisture-proof member opposite the columnar scintillator crystal layer, and press-bonding the moisture-proof member to the substrate;
- vacuum-sealing the moisture-proof member and the substrate while ensuring a void between the moisture-proof member and individual conic peak portions of columnar scintillator crystals forming the columnar scintillator crystal layer, to form a scintillator module;
- and
- storing and holding the scintillator module and a light receiving unit in a casing in a given positional relationship.
Dependencies are inferred from the claim text.