Imprint apparatus, imprint method, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsNaoki Murasato, Ken Minoda
Life of this patent
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Abstract
An imprint apparatus cures an imprint material by irradiating the imprint material with light while the imprint material on a substrate is in contact with a pattern region of a mold. The imprint apparatus includes a first supply unit configured to supply a first gas to a gap between the substrate and the mold, the first gas accelerating filling of recessed portions of the pattern region with the imprint material, and a second supply unit configured to supply a second gas to the gap, the second gas inhibiting curing of the imprint material.
Claims14
An imprint apparatus that cures an imprint material by irradiating the imprint material with light while the imprint material on a substrate is in contact with a pattern region of a mold, the imprint apparatus comprising:
- a first supply unit configured to supply a first gas to a gap between the substrate and the mold, the first gas accelerating filling of recessed portions of the pattern region with the imprint material;
- a second supply unit configured to supply a second gas to the gap, the second gas inhibiting curing of the imprint material;
- and
- a pressure regulator configured to supply pressure to the back side of the mold so as to bulge toward the substrate,
- wherein the first supply unit supplies the first gas to the gap while the substrate and the mold are moving relative to each other with the imprint material not in contact with the pattern region of the mold,
- wherein the second supply unit starts to supply the second gas around the pattern region when the pressure regulator deforms the mold to bulge toward the substrate and the pattern region of the mold is in contact with the imprint material.
An imprint method that cures an imprint material by irradiating the imprint material with light while the imprint material on a substrate is in contact with a pattern region of a mold, the imprint method comprising the steps of:
- supplying a first gas to a gap between the substrate and the mold, the first gas accelerating filling of recessed portions of the pattern region with the imprint material;
- supplying a second gas to the gap, the second gas inhibiting curing of the imprint material, and
- supplying pressure to the back side of the mold so as to bulge toward the substrate,
- the step of supplying the first gas supplies the first gas to the gap while the substrate and the mold are moving relative to each other, with the imprint material not in contact with the pattern region of the mold;
- and
- the step of supplying the second gas supplies the second gas around the pattern region when the mold is deformed to bulge toward the substrate in the step of supplying pressure and the pattern region of the mold is in contact with the imprint material.
An article manufacturing method comprising the steps of:
- forming a pattern on a substrate using an imprint apparatus;
- and
- processing the substrate having the pattern formed thereon by the step of forming,
- wherein the imprint apparatus that cures an imprint material by irradiating the imprint material with light while the imprint material on a substrate is in contact with a pattern region of a mold, the imprint apparatus comprising:
- a first supply unit configured to supply a first gas to a gap between the substrate and the mold, the first gas accelerating filling of recessed portions of the pattern region with the imprint material;
- a second supply unit configured to supply a second gas to the gap, the second gas inhibiting curing of the imprint material;
- and
- a pressure regulator configured to supply pressure to the back side of the mold so as to bulge toward the substrate,
- wherein the first supply unit supplies the first gas to the gap while the substrate and the mold are moving relative to each other with the imprint material not in contact with the patter region of the mold, and
- wherein the second supply unit starts to supply the second gas around the pattern region when the pressure regulator deforms the mold to bulge toward the substrate and the pattern region of the mold is in contact with the imprint material.
Dependencies are inferred from the claim text.