Member, method of manufacturing the same, apparatus for manufacturing the same, and semiconductor manufacturing apparatus

A manufacturing apparatus for a member, the manufacturing apparatus comprising:

• a chamber that includes a base material structure, wherein the base material structure includes a planar surface, and a surface layer formed on the planar surface;
• and
• a nozzle disposed in the chamber,
• wherein the nozzle is open inside of the chamber,
• wherein the nozzle sprays a raw material powder onto the planar surface to form the surface layer, and
• wherein a particle incident angle formed by a spray axis of the raw material powder and the planar surface is equal to or less than 30 degrees,
• wherein the surface layer includes a particle that includes Y—O—F,
• wherein the base material structure includes an interface layer in contact with the surface layer and a base body in contact with the interface layer thereof, wherein the interface layer of the base material structure includes a first layer and a second layer,
• wherein the interface layer of the base material structure includes fluorine,
• wherein the second layer is closer to the base body than the first layer, and
• wherein the second layer has a fluorine content that is greater than that of the first layer.