Back to results
US 11,421,729 B2Granted
Elastic guiding device, positioning device, blade and lithographic apparatus
AssigneeASML Netherlands B.V.
InventorsErwin Andreas Bernardus Mulder, Krijn Frederik Bustraan, Antonius Franciscus Johannes De Groot, Rinze Koolstra, Paul Peter Anna Antonius Brom
Life of this patent
Estimating the term…
Abstract
The invention relates to elastic guiding device to support a mass with respect to a base in a support direction, wherein the stiffness in support direction compared to stiffness in other direction, for example the stiffness in vertical direction compared to the stiffness in horizontal directions is substantially increased. The invention further relates to a positioning device comprising at least one elastic guiding device, and a lithographic apparatus comprising such positioning device.
Claims13
An elastic guiding device configured to support a mass with respect to a base in a support direction, comprising:
- a first blade extending in a first plane;
- and
- a second blade extending in a second plane,
- wherein the first plane and the second plane both extend in the support direction,
- wherein a first side of the first blade is connected to the base and a second side of the first blade, opposite to the first side of the first blade, is connected to a first side of the second blade,
- wherein a second side of the second blade, opposite to the first side of the second blade is connected to the mass,
- wherein the first blade comprises at least one rigid element and at least one leaf spring element,
- wherein the at least one leaf spring element extends over a complete length of the first blade in the support direction,
- wherein the second blade comprises at least one rigid element and at least one leaf spring element,
- wherein the at least one leaf spring element extends over a complete length of the second blade in the support direction, and
- wherein the second side of the first blade is connected to the first side of the second blade by a cross flexure.
8 more elements
A positioning device configured to displace an object, comprising:
- a stage configured to support the object;
- an actuator configured to move the stage with respect to a reference in a direction of movement;
- a balance mass arranged between the actuator and the reference and configured to reduce transfer of reaction forces from the actuator to the reference;
- and
- a support device arranged between the reference and the balance mass and configured to support the balance mass,
- wherein the support device comprises at least one elastic guiding device to support the balance mass with respect to a base in a support direction, comprising:
- a first blade extending in a first plane;
- and
- a second blade extending in a second plane,
- wherein the first plane and the second plane both extend in the support direction,
- wherein a first side of the first blade is connected to the base and a second side of the first blade, opposite to the first side of the first blade, is connected to a first side of the second blade,
- wherein a second side of the second blade, opposite to the first side of the second blade, is connected to the mass,
- wherein the first blade comprises at least one rigid element and at least one leaf spring element,
- wherein the at least one leaf spring element extends over a complete length of the first blade in the support direction,
- wherein the second blade comprises at least one rigid element and at least one leaf spring element,
- wherein the at least one leaf spring element extends over a complete length of the second blade in the support direction, and
- wherein the second side of the first blade is connected to the first side of the second blade by a cross flexure.
14 more elements
A lithographic apparatus comprising a positioning device configured to displace an object, comprising:
- a stage configured to support the object,
- an actuator configured to move the stage with respect to a reference in a direction of movement,
- a balance mass arranged between the actuator and the reference and configured to reduce transfer of reaction forces from the actuator to the reference, and
- a support device arranged between the reference and the balance mass and configured to support the balance mass,
- wherein the support device comprises at least one elastic guiding device to support the balance mass with respect to a base in a support direction, comprising a first blade extending in a first plane, and a second blade extending in a second plane,
- wherein the first plane and the second plane both extend in the support direction,
- wherein a first side of the first blade is connected to the base and a second side of the first blade, opposite to the first side of the first blade, is connected to a first side of the second blade,
- wherein a second side of the second blade, opposite to the first side of the second blade is connected to the mass,
- wherein the first blade comprises at least one rigid element and at least one leaf spring element,
- wherein the at least one leaf spring element extends over a complete length of the first blade in the support direction,
- wherein the second blade comprises at least one rigid element and at least one leaf spring element,
- wherein the at least one leaf spring element extends over a complete length of the second blade in the support direction, and
- wherein the second side of the first blade is connected to the first side of the second blade by a cross flexure.
10 more elements
Dependencies are inferred from the claim text.