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US 11,421,342 B2Granted
Method of decomposing quartz sample, method of analyzing metal contamination of quartz sample, and method of manufacturing quartz member
AssigneeSumco Corporation
InventorsHirokazu Kato, Takashi Muramatsu
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Abstract
Provided is a method of decomposing a quartz sample, which includes contacting a liquid in which at least a part of a quartz sample to be analyzed is immersed with a gas generated from a mixed acid to decompose at least a part of the quartz sample, wherein the liquid is a liquid containing at least water; and the mixed acid is a mixed acid of hydrogen fluoride and sulfuric acid, and a mole fraction of sulfuric acid in the mixed acid ranges from 0.07 to 0.40.
Claims18
A method of decomposing a quartz sample, which comprises:
- contacting a liquid in which at least a part of a quartz sample to be analyzed is immersed with a gas generated from a mixed acid to decompose at least a part of the quartz sample,
- wherein
- the liquid is a liquid comprising at least water;
- and
- the mixed acid is a mixed acid consisting of hydrogen fluoride and sulfuric acid, and
- a mole fraction of sulfuric acid in the mixed acid ranges from 0.07 to 0.40.
3 more elements
Dependencies are inferred from the claim text.