Interconnect with nanotube fitting
AssigneeMeta Platforms Technologies, LLC
InventorsAli Sengül, Zheng Sung Chio, Daniel Brodoceanu, Oscar Torrents Abad, Jeb Wu, Tennyson Nguty
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Abstract
A light emitting diode (LED) array is formed by bonding an LED substrate to a backplane substrate via fitted nanotube interconnects. The backplane substrate may include circuits for driving the LED array. The LED substrate may be a chip or wafer, and may include one or more LED devices. The LED substrate is positioned above the backplane substrate, such that a LED device of the LED substrate is aligned to a corresponding circuit in the backplane substrate. Each of the fitted interconnects electrically connect a LED device to the corresponding circuit of the backplane substrate.
Claims12
A device comprising:
- a first substrate comprising a first surface, and a nanotube connected to and protruding from the first surface, the nanotube formed with an opening at a center of the nanotube and extending in a longitudinal direction of the nanotube;
- and
- a second substrate comprising a second surface facing the first surface, and a nanostructure connected to and protruding from the second surface towards the first surface but spaced away from the first surface, at least part of the nanostructure fitted into the opening of the nanotube at the center of the nanotube to form a conductive interconnect,
- wherein one of the first substrate and the second substrate comprises a light emitting diode (LED), and the other of the first substrate and the second substrate comprises circuits to operate the light emitting diode.
An electronic device fabricated by a method comprising:
- positioning a first substrate relative to a second substrate to align a nanotube having an opening at a center of the nanotube and extending in a longitudinal direction of the nanotube protruding from the first substrate with a nanostructure protruding from the second substrate;
- making a relative movement between the first substrate and the second substrate after positioning the first substrate relative to the second substrate;
- and
- fitting at least part of the nanostructure into the opening at the center of the nanotube to form a conductive interconnect after making the relative movement between the first substrate and the second substrate, the nanostructure spaced apart from the first substrate,
- wherein one of the first substrate and the second substrate comprises a light emitting diode (LED), and the other of the first substrate and the second substrate comprises circuits to operate the light emitting diode.
Dependencies are inferred from the claim text.