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US 11,417,563 B2Granted
Apparatus and method for adjusting a pedestal assembly for a reactor
AssigneeASM America, Inc.
InventorMichael Haplin
Life of this patent
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Abstract
The invention is directed to an alignment assembly for changing the relative position of a plate of a pedestal assembly with respect to a processing chamber of a reactor. The alignment assembly is connected at a first end to a riser shaft of the heating assembly and at a second end to a drive shaft. One or more portions of the alignment assembly may be selectively axially rotated or laterally moved change the relative position of the plate with respect to the processing chamber as desired.
Claims20
An apparatus adapted to be connected to a drive shaft, the apparatus comprising:
- a plate, wherein the plate includes a surface and a longitudinal central axis;
- a riser shaft secured to the plate;
- and
- an alignment assembly having a first end and a second end vertically below the first end, wherein the first end of the alignment assembly connects to the riser shaft, and wherein the second end of the alignment assembly connects to the drive shaft;
- wherein the alignment assembly selectively adjusts the orientation of one or both of the surface and the longitudinal central axis;
- and
- wherein the alignment assembly is positioned intermediately to the drive shaft and the riser shaft.
4 more elements
Dependencies are inferred from the claim text.