Flat type lamp for photoionization detector and method for manufacturing the same
AssigneeSenko Co., Ltd.
InventorSeung Chul Ha
Life of this patent
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Abstract
A disclosed flat type lamp for a photoionization detector includes: a first plate member having a plate shape and having a first surface on which a plurality of discharge cavities is formed; a second plate member isolating the plurality of discharge cavities from the outside by being disposed and sealed on the first surface of the first plate member; electrodes disposed on the first and second plate members and arranged to face each other; and a discharge gas filled in the plurality of discharge cavities and producing vacuum ultraviolet using electric force that is applied through the electrodes.
Claims9
A flat type lamp for a photoionization detector, the flat type lamp comprising:
- a first plate member having a plate shape and having a first surface on which a plurality of discharge cavities is formed;
- a second plate member isolating the plurality of discharge cavities from the outside by being disposed and sealed on the first surface of the first plate member;
- electrodes disposed on the first and second plate members and arranged to face each other;
- and
- a discharge gas filled in the plurality of discharge cavities and producing vacuum ultraviolet using electric force that is applied through the electrodes, wherein the discharge gas is filled into the plurality of discharge cavities simultaneously when the second plate member is bonded to the first plate member in a chamber isolated from the outside and filled with the discharge gas.
A method of manufacturing a flat type lamp for a photoionization detector, the flat type lamp including a first plate member having a plate shape and a first surface, a second plate member, electrodes, and a discharge gas, the method comprising:
- forming the electrodes on the first and second plate members to face each other;
- forming a plurality of discharge cavities on the first surface of the first plate member and between the first and second plate members;
- forming sealing materials for sealing with the second plate member on the first surface of the first plate member except for inner sides of the plurality of discharge cavities;
- putting and stacking the first and second plate members in a chamber having an internal space that can be selectively isolated from the outside;
- isolating the internal space of the chamber from the outside and evacuating the internal space;
- making the internal space into a discharge gas atmosphere by supplying the discharge gas into the internal space and producing vacuum ultraviolet using electric force that is applied through the electrodes;
- and
- sealing the plurality of discharge cavities to isolate the plurality of discharge cavities from the outside by hardening the sealing materials.
Dependencies are inferred from the claim text.