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US 11,414,746 B2Granted
Film forming apparatus and film forming method using the same
AssigneeCanon Kabushiki Kaisha
InventorsKazuya Demura, Takamasa Horie, Hiroyuki Kobayashi
Life of this patent
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Abstract
A film forming apparatus includes a base material support mechanism configured to rotate a base material supported by the base material support mechanism about a first axis, and a first cathode portion on which a target in a cylindrical shape containing a film forming material is mounted and configured to rotate the target about a second axis, in a chamber. The second axis is disposed at a position skewed with respect to the first axis.
Claims20
A film forming apparatus comprising:
- a base material support mechanism configured to rotate a base material supported by the base material support mechanism about a first rotation axis;
- a first cathode portion configured to rotate a target in a first cylindrical shape about a second rotation axis;
- and
- a second cathode portion configured to rotate a target in a second cylindrical shape about a third rotation axis,
- wherein
- the second rotation axis and the third rotation axis are disposed at positions skewed with respect to the first rotation axis,
- a relation of Ma<Mb is satisfied, where Ma is a distance between the second rotation axis and a base material support surface of the base material support mechanism in a direction in which the first rotation axis extends and Mb is a distance between the third rotation axis and the base material support surface of the base material support mechanism in the direction in which the first rotation axis extends, and
- a relation of La>Lb is satisfied, where La is a distance between the first rotation axis and the second rotation axis when viewed in the direction in which the first rotation axis extends and Lb is a distance between the first rotation axis and the third rotation axis when viewed in the direction in which the first rotation axis extends, and
- wherein, when viewed in the direction in which the first rotation axis extends, R is a radius of a circle drawn by points farthest from the first rotation axis within a film-formed surface of the base material supported by the base material support mechanism, the distance La between the first rotation axis and the second rotation axis is greater than or equal to R.
6 more elements
A method of manufacturing a lens, the method comprising:
- preparing a base material;
- mounting the base material on a base material support mechanism and rotating the base material about a first rotation axis;
- rotating a first cathode portion about a second rotation axis disposed at a position skewed with respect to the first rotation axis, and rotating a second cathode portion about a third rotation axis parallel to the second rotation axis;
- forming a film made of a material of the first target and a material of the second target on the base material by applying voltage to the first cathode portion and the second cathode portion,
- wherein
- a relation of Ma<Mb is satisfied, where Ma is a distance between the second rotation axis and a base material support surface of the base material support mechanism in a direction in which the first rotation axis extends and Mb is a distance between the third rotation axis and the base material support surface of the base material support mechanism in the direction in which the first rotation axis extends, and
- a relation of La>Lb is satisfied, where La is a distance between the first rotation axis and the second rotation axis when viewed in the direction in which the first rotation axis extends and Lb is a distance between the first rotation axis and the third rotation axis when viewed in the direction in which the first rotation axis extends, and
- wherein, when viewed in the direction in which the first rotation axis extends, R is a radius of a circle drawn by points farthest from the first rotation axis within a film-formed surface of the base material supported by the base material support mechanism, the distance La between the first rotation axis and the second rotation axis is greater than or equal to R.
5 more elements
Dependencies are inferred from the claim text.