Film-forming material and film
AssigneeNippon Yttrium Co., Ltd.
InventorsNaoki Fukagawa, Ryuichi Sato
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Abstract
A coating material containing an oxyfluoride of yttrium and having a Fisher diameter of 1.0 to 10 μm and a tap density TD to apparent density AD ratio, TD/AD, of 1.6 to 3.5. The coating material preferably has a pore volume of pores with a diameter of 100 μm or smaller of 1.0 cm3/g or less as measured by mercury intrusion porosimetry. A coating containing an oxyfluoride of yttrium and having a Vickers hardness of 200 HV0.01 or higher. The coating preferably has a fracture toughness of 1.0×102 Pa·m1/2 or higher.
Claims19
A coating material comprising an oxyfluoride of yttrium and having a Fisher diameter of 1.0 to 10 μm and a ratio TD/AD of a tap density TD to an apparent density AD, of 1.6 to 3.5 wherein the tap density TD and the apparent density AD are measured in accordance with Japanese Industrial Standards, JIS Z 2512 and JIS K 5101, respectively.
A powder for a coating material, the powder comprising an oxyfluoride of yttrium and having a Fisher diameter of 1.0 to 10 μm and a ratio TD/AD of a tap density TD to an apparent density AD, of 1.6 to 3.5 wherein the tap density TD and the apparent density AD are measured in accordance with Japanese Industrial Standards, JIS Z 2512 and JIS K 5101, respectively.
Dependencies are inferred from the claim text.