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US 11,413,869 B2Granted
MEMS jetting structure for dense packing
AssigneeFUJIFILM Dimatix, Inc.
InventorsAndreas Bibl, Kevin von Essen, Paul A. Hoisington
Life of this patent
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Abstract
A fluid ejector includes a fluid ejection module having a substrate and a layer separate from the substrate. The substrate includes a plurality of fluid ejection elements arranged in a matrix, each fluid ejection element configured to cause a fluid to be ejected from a nozzle. The layer separate from the substrate includes a plurality of electrical connections, each electrical connection adjacent to a corresponding fluid ejection element.
Claims14
A method for fluid ejection from a print head, the method comprising:
- providing an electrical signal along a particular electrical connection of an interposer to a particular fluid ejection actuator of multiple fluid ejection actuators housed by a substrate,
- wherein each of the multiple fluid ejection actuators corresponds to a respective ejector flow path defined through the substrate, each ejector flow path including a nozzle defined on a first surface of the substrate, and a conduit extending from the nozzle to a second surface of the substrate opposite the first surface, and
- wherein the interposer is attached to the second surface of the substrate and wherein a surface of the interposer that faces the second surface of the substrate is separated from the second surface of the substrate by an air gap, and
- wherein the interposer includes multiple electrical connections and multiple interposer flow paths, each electrical connection corresponding to a respective one of the multiple fluid ejection actuators and each interposer flow path being in fluid communication with a corresponding ejector flow path;
- actuating the particular fluid ejection actuator responsive to the electrical signal, comprising deflecting a membrane of the particular fluid ejection actuator into the air gap;
- and
- ejecting fluid from the nozzle of the particular ejector flow path corresponding to the particular fluid ejection actuator responsive to actuation of the particular fluid ejection actuator.
4 more elements
Dependencies are inferred from the claim text.