Electromechanical resonators based on metal-chalcogenide nanotubes
AssigneesYeda Research and Development Co. Ltd., B. G. Negev Technologies and Applications Ltd., At Ben-Gurion University
InventorsReshef Tenne, Ernesto Joselevich, Yiftach Divon, Roi Levi, Assaf Yaakobovitz, Dan Yudilevich
Life of this patent
Estimating the term…
Abstract
This invention provides electromechanical resonators based on metal chalcogenide nanotubes. The invention further provides methods of fabrication of electromechanical resonators and methods of use of such electromechanical resonators.
Claims37
An electromechanical resonator comprising at least one metal-chalcogenide nanotube, the resonator further comprising a substrate, a first pad, a second pad and a pedal in contact with said metal-chalcogenide nanotube, wherein said pedal is positioned asymmetrically with respect to said metal-chalcogenide nanotube.
A method of operating an electromechanical resonator, said method comprising:
- providing a resonator comprising:
- at least one metal chalcogenide nanotube;
- a substrate;
- optionally an electrode fabricated on said substrate;
- at least a first pad and a second pad assembled on said substrate;
- electrical contacts connected to said first and second pads, optionally to said substrate and/or optionally to said electrode;
- wherein a first region of said metal-chalcogenide nanotube is in contact with said first pad and a second region of said nanotube is in contact with said second pad, and wherein a third region of said nanotube is suspended over said substrate;
- applying voltage between said pads and said substrate or between said pads and said electrode, such that said voltage generates mechanical response of said metal chalcogenide nanotube;
- wherein said electromechanical resonator further comprises a pedal, said pedal is in contact with said suspended nanotube, such that said pedal is suspended over said substrate, said pedal is positioned asymmetrically with respect to said metal chalcogenide nanotube.
Dependencies are inferred from the claim text.