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US 11,409,194 B2Granted
Resist composition and patterning process
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsJun Hatakeyama, Masaki Ohashi, Takayuki Fujiwara
Life of this patent
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Abstract
A resist composition comprising a base polymer and a quencher in the form of an amine compound having an iodized aromatic ring bonded to the nitrogen atom via a divalent hydrocarbon group offers a high sensitivity and minimal LWR or improved CDU, independent of whether it is of positive or negative tone.
Claims14
A resist composition comprising a base polymer and a quencher, the quencher being an amine compound, wherein the amine compound has the formula (A):
- wherein R1 is hydroxyl, C1-C6 alkyl group, C1-C6 alkoxy group, C2-C6 acyloxy group, fluorine, chlorine, bromine, amino group, —NR1A—C(═O)—R1B, or —NR1A—C(═O)—O—R1B, R1A is hydrogen or a C1-C6 alkyl group, R1B is a C1-C6 alkyl, C2-C8 alkenyl, C6-C12 aryl or C7-C13 aralkyl group,
- R2 is hydrogen, nitro, or a C1-C20 monovalent hydrocarbon group which may contain at least one moiety selected from hydroxyl, carboxyl, thiol, ether bond, ester bond, nitro, cyano, halogen and amino moiety, in case of p=1, R2 may bond together to form a ring with the nitrogen atom to which they are attached, the ring optionally containing a double bond, oxygen, sulfur or nitrogen, or R2 and X may bond together to form a ring with the nitrogen atom to which they are attached, the ring optionally containing a double bond, oxygen, sulfur or nitrogen,
- X is a C1-C20 divalent hydrocarbon group which contains at least one moiety selected from ester bond and ether bond,
- m and n are independently an integer meeting 1≤m≤5, 0≤n≤4 and 1≤m+n≤5, and p is 1, 2 or 3.
1 more element
An amine compound having the formula (A′):
- wherein R1 is hydroxyl, C1-C6 alkyl, C1-C6 alkoxy group, C2-C6 acyloxy group, fluorine, chlorine, bromine, amino, —NR1A—C(═O)—R1B, or —NR1A—C(═O)—O—R1B, R1A is hydrogen or a C1-C6 alkyl group, R1B is a C1-C6 alkyl, C2-C8 alkenyl, C6-C12 aryl or C7-C13 aralkyl group,
- X is a C1-C20 divalent hydrocarbon group which may contain at least one moiety selected from ester bond and ether bond,
- the ring R3 is a C4-C6 heterocycle formed with the nitrogen atom, which may contain an ether bond, thioether bond, —N(R4)—, carbonyl group or sulfonyl group, R4 is hydrogen, C1-C6 alkyl, C2-C6 alkenyl, C2-C8 acyl, C7-C20 aralkyl or C1-C16 alkoxycarbonyl group,
- m and n are independently an integer meeting 1≤m≤5, 0≤n≤4 and 1≤m+n≤5.
1 more element
Dependencies are inferred from the claim text.