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US 11,409,046 B2Granted
Backside binary grated lens coupled to front side waveguide
AssigneeInternational Business Machines Corporation
InventorsYoba Amoah, Brennan J. Brown, John J. Ellis-Monaghan, Ashleigh R. Kreider
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Abstract
A wafer structure includes a diffractive lens disposed on a backside of a wafer and coupled to a front side waveguide, the diffractive lens being configured to receive light and focus the light to the front side waveguide.
Claims19
A method comprising:
- forming a waveguide to a front side of a semiconductor wafer;
- forming an insulator layer on a backside of the semiconductor wafer;
- etching a plurality of trenches through the insulator layer;
- and
- forming segments by filling the plurality of trenches with material, wherein each of the segments extends from a first surface of the insulator layer to a second surface of the insulator layer,
- wherein the insulator layer and the segments constitute a diffractive lens configured to receive light and focus the light to the waveguide connected to the front side of the semiconductor wafer.
3 more elements
Dependencies are inferred from the claim text.