Accelerometric sensor in mems technology having high accuracy and low sensitivity to temperature and ageing

A method, comprising:

• detecting an external acceleration with an accelerometer including a suspended region having a first mobile mass, a second mobile mass, and a central mass anchored to a surface of a supporting region, detecting the external acceleration including:
• acquiring a first signal when the first mobile mass is in a first position and the second mobile mass is in a second position, the first signal is acquired from a sensing element coupled to the central mass of the accelerometer, the central mass is positioned between the first mobile mass and the second mobile mass, the central mass separates the first mobile mass from the second mobile mass, and a plurality of elastic connection elements couples the central mass to the first mobile mass and the second mobile mass;
• driving the first mobile mass to a third position different from the first position by applying a first variable driving voltage to a first driving assembly of the accelerometer coupled to a first sidewall of the first mobile mass transverse to the surface, and driving the second mobile mass to a fourth position different from the second position by applying a second variable driving voltage to a second driving assembly of the accelerometer coupled to a second sidewall of the second mobile mass transverse to the surface, the central mass rotating in response to driving the first mobile mass to the third position and driving the second mobile mass to the fourth position;
• acquiring a second signal when the first mobile mass is in the third position and the second mobile mass is in the fourth position, the second signal is acquired from the sensing element coupled to the central mass of the accelerometer;
• and
• generating an accelerometric signal based on the first signal and the second signal.

A method, comprising:

• detecting an external acceleration with an accelerometer including a suspended region anchored to a surface of a supporting region and suspended over the supporting region, the suspended region including a mobile mass and a central mass coupled to the mobile mass by a plurality of elastic connection elements and anchored to the surface, detecting the external acceleration with the accelerometer including:
• acquiring a first signal when the mobile mass is in a first position, the first signal is between a mobile sensing electrode coupled to the central mass and a fixed sensing electrode coupled to a substrate of the accelerometer;
• driving the mobile mass from the first position to a second position different from the first position by moving the mobile mass and a first electrode of an electrode driving assembly coupled to a first sidewall of the mobile mass transverse to the surface from the first position to the second position by applying a variable driving voltage to a second electrode of the electrode driving assembly coupled to a second sidewall of the supporting region transverse to the surface, the central mass rotating in response to driving the mobile mass from the first position to the second position;
• acquiring a second signal between the mobile sensing electrode and the fixed sensing electrode when the central mass is rotated;
• and generating an accelerometric signal based on the first signal and the second signal.