Vibration polishing device
AssigneeAtm S.A.
InventorsMichael Kley, Matthias Höfer
Life of this patent
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Abstract
The present disclosure relates to a vibration polishing device, comprising: a vibration drive for generating an oscillating vibration for polishing samples; a polishing disc which is connected to and can be driven by the vibration drive; and a polishing bowl which is designed to receive a polishing medium and the samples to be polished and is coupled to the polishing disc for being entrained therewith; wherein the vibration drive comprises a base part, a counter-oscillating part, a vibration plate, and drive parts, for driving in an oscillating manner the counter-oscillating part and the vibration plate against the force of leaf springs.
Claims12
A vibration polishing device comprising:
- a vibration drive comprising a base part, a counter-oscillating part, a vibration plate, a first drive part, and a second drive part;
- wherein the base part and the counter-oscillating part are coupled by first leaf springs having their main planes grouped around a central axis in accordance with radial helical surfaces;
- wherein the base part and the vibration plate are coupled by second leaf springs having their main planes grouped around the central axis in accordance with radial helical surfaces;
- and
- wherein the first drive part is arranged so as to be supported on the counter-oscillating part, and the second drive part is arranged so as to be supported on the vibration plate, for generating oppositely oscillating rotational oscillatory movements between the counter-oscillating part and the vibration plate when the vibration drive is in operation;
- further comprising:
- a polishing disc which is firmly connected to the vibration plate;
- and
- a polishing bowl which is adapted to receive a polishing medium and the samples to be polished and which is coupled to the polishing disc.
Dependencies are inferred from the claim text.