Imprint mold-forming synthetic quartz glass substrate
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsHiroyuki Yamazaki, Masao Ando, Daiyu Okafuji, Masaki Takeuchi
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Abstract
In an imprint mold-forming synthetic quartz glass substrate (1) of rectangular shape having dimensions L1 and L2 with L1≥L2, a circular region is delineated on the substrate back surface by a circle of radius R with L2−2R≥10 mm. When approximation analysis is performed from the 1st to 8th term in the Zernike polynomials on the circular region, a coefficient of the 4th term is equal to or greater than −(2R/100,000×1) μm.
Claims11
An imprint mold-forming synthetic quartz glass substrate of rectangular shape having a longitudinal dimension L1 and a lateral dimension L2 wherein L1≥L2, the substrate having a front surface where a mold pattern is to be formed, a back surface opposed thereto, and a center, wherein when approximation analysis is performed from the 1st to 8th term in the Zernike polynomials on a circular region which is delineated on the back surface by a circle having a radius R from the substrate center wherein L2−2R≥10 mm, a coefficient of the 4th term is equal to or greater than −(2R/100,000×1) μm.
Dependencies are inferred from the claim text.