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US 11,402,124 B2Granted
Fluid heater, fluid control apparatus, and production method for fluid heater
AssigneeFujikin Incorporated
InventorsTsuneyuki Okabe, Toshiyuki Inada, Taiji Chiba, Tatsuhiko Sato, Michio Yamaji, Tadayuki Yakushijin
Life of this patent
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Abstract
A fluid heater includes: a passage member having a passage formed therein; a heater for heating the passage member; a fixing member for fixing the passage member to a fluid control device; and a connection member connected to the passage member so as to allow fluid to flow into the passage member. The passage has a helical shape.
Claims7
A fluid heater comprising:
- a passage member having a passage formed therein and manufactured by a metal powder sintering shaping method;
- a heater for heating the passage member;
- a fixing member for fixing the passage member to a fluid control device;
- and
- a connection member connected to the passage member so as to allow fluid to flow into the passage member,
- wherein the passage has a helical shape,
- a cross section along a longitudinal direction of the passage has a polygonal shape, and
- the passage member is shaped so that a shaping direction thereof is parallel to one of diagonal lines of the polygonal shape.
5 more elements
A fluid control apparatus comprising:
- a plurality of fluid control devices fixed to a joint;
- and
- a fluid heater for heating fluid flowing into the fluid control device, the fluid heater including:
- a passage member having a passage formed therein and manufactured by a metal powder sintering shaping method;
- a heater for heating the passage member;
- a fixing member for fixing the passage member to the fluid control device;
- and
- a connection member connected to the passage member so as to allow fluid to flow into the passage member,
- wherein the passage has a helical shape,
- a cross section along a longitudinal direction of the passage has a polygonal shape, and
- the passage member is shaped so that a shaping direction thereof is parallel to one of diagonal lines of the polygonal shape.
8 more elements
A production method for producing a fluid heater which includes:
- a passage member having a passage formed therein;
- a heater for heating the passage member;
- a fixing member for fixing the passage member to a fluid control device;
- and a connection member connected to the passage member so as to allow fluid to flow into the passage member, wherein the passage has a helical shape, the method comprising:
- manufacturing the passage member by a metal powder sintering shaping method;
- and
- combining the heater, the fixing member, and the connection member with the passage member,
- wherein a cross section along a longitudinal direction of the passage has a polygonal shape, and
- the passage member is shaped so that a shaping direction thereof is parallel to one of diagonal lines of the polygonal shape.
6 more elements
Dependencies are inferred from the claim text.