Method of using oscillating assembly and exhaust system
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPo-Hsuan Huang, Tung-Lin Yang
Life of this patent
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Abstract
A method of using an exhaust system includes activating an oscillating assembly connected to an exhaust line, wherein the oscillating assembly is configured to vibrate the exhaust line. The method further includes measuring a value indicating a flow of particles through the exhaust line. The method further includes comparing the value with a predetermined threshold value. The method further includes increasing a rate of vibration of the exhaust line in response to the value being below the predetermined threshold value.
Claims20
A method of using an exhaust system configured for production of semiconductors and componentry thereof, the method comprising:
- activating an oscillating assembly connected to an exhaust line, wherein the oscillating assembly is configured to vibrate the exhaust line;
- measuring a value indicating a flow of particles through the exhaust line;
- comparing the value with a predetermined threshold value;
- and
- increasing a rate of vibration of the exhaust line in response to the value being below the predetermined threshold value.
A method of using an oscillating assembly configured for production of semiconductors and componentry thereof, the method comprising:
- attaching the oscillating assembly to a line configured to transport particles;
- receiving a flow at an inlet of a chamber of the oscillating assembly;
- discharging the flow at an outlet of the chamber;
- rotating a moveable element within the chamber using the flow;
- and
- modifying a flow rate of the flow to adjust a rotation speed of the moveable element within the chamber.
A method of using an exhaust system configured for production of semiconductors and componentry thereof, the method comprising:
- activating a first oscillating assembly connected to an exhaust line at a first location, wherein the first oscillating assembly is configured to vibrate the exhaust line;
- measuring a flow of particles through the exhaust line;
- increasing a rate of vibration of the exhaust line in response to the flow of particles being below a predetermined threshold value;
- and
- detecting a flow rate in the exhaust line in response to the flow of particles being below the predetermined threshold value.
Dependencies are inferred from the claim text.