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US 11,401,599 B2Granted
Erosion resistant metal silicate coatings
AssigneeApplied Materials, Inc.
InventorsXiao-Ming He, Cheng-Hsuan Chou, Jennifer Y. Sun
Life of this patent
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Abstract
Disclosed are rare earth metal containing silicate coatings, coated articles (e.g., heaters and susceptors) or bodies of articles and methods of coating such articles with a rare earth metal containing silicate coating.
Claims13
An article comprising:
- a body, wherein the body comprises a material selected from the group consisting of aluminum nitride, graphite, silicon carbide, tantalum carbide and combinations thereof;
- and
- a rare earth metal containing silicate coating on a surface of the body, the rare earth metal containing silicate coating having a thickness of about 3 nm to about 250 μm,
- wherein the rare earth metal containing silicate coating comprises at least one of yttrium monosilicate (Y2SiO5), yttrium disilicate (Y2Si2O7), erbium monosilicate (Er2SiO5), erbium disilicate (Er2Si2O7), tantalum monosilicate (Ta2SiO5), tantalum disilicate (Ta2Si2O7), iridium monosilicate (Ir2SiO5), iridium disilicate (Ir2Si2O7), rhodium monosilicate (Rh2SiO5), rhodium disilicate (Rh2Si2O7), lanthanum monosilicate (La2SiO5), lanthanum disilicate (La2Si2O7), lutetium monosilicate (Lu2SiO5), lutetium disilicate (Lu2Si2O7), scandium monosilicate (Sc2SiO5), scandium disilicate (Sc2Si2O7), gadolinium monosilicate (Gd2SiO5), gadolinium disilicate (Gd2Si2O7), samarium monosilicate (Sm2SiO5), samarium disilicate (Sm2Si2O7), dysprosium monosilicate (Dy2SiO5), dysprosium disilicate (Dy2Si2O7) and combinations thereof.
1 more element
Dependencies are inferred from the claim text.