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US 11,401,197 B2Granted
Halogen doped optical fibers
AssigneeCorning Incorporated
InventorsSteven Bruce Dawes, Pushkar Tandon
Life of this patent
Estimating the term…
Abstract
A method of forming an optical fiber preform includes: flowing a silicon halide and an oxidizer inside of a substrate tube, wherein a molar ratio of the silicon halide to the oxidizer is from about 1.5 to about 5.0; applying a plasma to the substrate tube to heat the substrate tube to a temperature of from about 1000° C. to about 1700° C.; and depositing silica glass comprising a halogen inside the substrate tube.
Claims16
A method of forming an optical fiber preform, comprising:
- flowing a silicon halide and an oxidizer inside of a substrate tube at a combined partial pressure of from about 5 Torr to about 45 Torr, wherein the silicon halide comprises SiCl4 and wherein a molar ratio of the silicon halide to the oxidizer is from 1.5 to 4.0;
- applying energy to form a plasma from the silicon halide and the oxidizer, the plasma heating an inside surface of the substrate tube to a temperature of from about 1000° C. to about 1700° C.;
- and
- depositing silica glass from a reaction of the silicon halide and the oxidizer on the inside surface of the substrate tube, the silica glass comprising chlorine derived from the silicon halide, wherein the silica glass includes a concentration of the chlorine of about 2 wt % or greater and the silica glass includes a relative refractive index greater than 0.06 Δ% per wt % of the chlorine compared to undoped SiO2.
1 more element
A method of forming an optical fiber preform, comprising:
- flowing a silicon halide and O2 inside of a substrate tube at a combined partial pressure of from about 5 Torr to about 45 Torr, wherein the silicon halide comprises SiCl4 and wherein a molar ratio of the silicon halide to O2 is greater than 1.5;
- applying energy to form a plasma from the silicon halide and the O2, the plasma heating an inside surface of the substrate tube to a temperature of from about 1000° C. to about 1700° C.;
- and
- depositing silica glass from a reaction of the silicon halide and the O2 on the inside surface of the substrate tube, the silica glass comprising chlorine derived from the silicon halide at a concentration of 2.0 wt % or greater and the silica glass including a relative refractive index greater than 0.06 Δ % per wt % of the chlorine compared to undoped SiO2.
1 more element
A method of forming an optical fiber;
- comprising:
- flowing a silicon halide and O2 inside of a substrate tube, wherein the silicon halide comprises SiCl4 and wherein a molar ratio of the silicon halide to O2 is greater than 1.5, further wherein a combined partial pressure of the silicon halide and O2 within the substrate tube is from about 5 Torr to about 45 Torr;
- applying energy to form a plasma from the silicon halide and the O2, the plasma heating an inside surface of the substrate tube to a temperature of from about 1000° C. to about 1400° C.;
- and
- depositing silica glass inside the substrate tube from a reaction of the silicon halide and the O2 on the inside surface of the substrate tube, the silica glass comprising chlorine derived from the silicon halide at a concentration of from about 2.0 wt % to about 7.0 wt % and the silica glass including a relative refractive index greater than 0.06 Δ% per wt % of the chlorine compared to undoped SiO2.
2 more elements
Dependencies are inferred from the claim text.