Method for generating high order harmonic frequencies and MEMS resonator
AssigneeNational Tsing Hua University
InventorsSheng-Shian Li, Gayathri Pillai
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Abstract
A method for generating high order harmonic frequencies includes: providing a piezoelectric resonant film; and inputting a driving signal with a single tone frequency for driving the piezoelectric resonant film to oscillate in a non-linear region so as to generate a plurality of high order harmonic frequencies. Therefore, the quantity of the high order harmonic frequencies can be adjusted by applying an electrical controlling method.
Claims15
A method for generating high order harmonic frequencies, the method comprising:
- providing a piezoelectric resonant film;
- and
- inputting a driving signal with a single tone frequency for driving the piezoelectric resonant film to oscillate in a non-linear region so as to generate a plurality of high order harmonic frequencies;
- wherein the high order harmonic frequencies are corresponding to a plurality of harmonics, and the harmonics comprise of a non-Eigen mode as well.
A method for generating high order harmonic frequencies, the method comprising:
- providing a piezoelectric resonant film;
- and
- inputting a driving signal with a frequency sweep range for driving the piezoelectric resonant film to oscillate in a non-linear region so as to generate a plurality of high order harmonic frequencies;
- wherein the high order harmonic frequencies are corresponding to a plurality of harmonics, and the harmonics comprise of a non-Eigen mode as well.
A method for generating high order harmonic frequencies, the method comprising:
- providing a piezoelectric resonant film;
- inputting a driving signal to the piezoelectric resonant film for driving the piezoelectric resonant film to oscillate in a non-linear region so as to generate a plurality of high order harmonic frequencies;
- and
- inputting a DC bias to the piezoelectric resonant film for adjusting a quantity of the high order harmonic frequencies.
A MEMS resonator, comprising:
- a bottom electrode;
- a piezoelectric resonant film located on the bottom electrode, wherein the piezoelectric resonant film comprises an equivalent high stiffness region and an equivalent low stiffness region;
- a first top electrode located on the equivalent low stiffness region;
- and
- a second top electrode located on the equivalent high stiffness region;
- wherein a driving signal is inputted from the first top electrode or the second top electrode for driving the piezoelectric resonant film to oscillate in a non-linear region so as to generate a plurality of high order harmonic frequencies;
- wherein the high order harmonic frequencies are corresponding to a plurality of harmonics, and the harmonics comprise of a non-Eigen mode as well.
Dependencies are inferred from the claim text.