CMP polishing system and associated pilot management system

A chemical mechanical polishing (CMP) system, arranged to perform CMP dispatching management by running a trial production process on a computer, the CMP system comprising:

• a plurality of CMP machines;
• a processor, arranged to execute the following steps:
• generating K set of initialization work schedules according to machine information of a plurality of CMP machines;
• filtering the K sets of initialization work schedules according to respective adaptability parameters of the K set of initialization work schedules to obtain L sets of intermediate work schedules among the K sets of initialization work schedules;
• performing crossing operations on the L sets of intermediate work schedules for M times to generate M sets of crossed work schedules, wherein each of the M times of crossing operations is to blend contents of a different duo of work schedules by respectively extracting portions of each of the duo in order to generate a set of crossed work schedules;
• performing mutation calculations on contents of the L sets of intermediate work schedules and the M sets of crossed work schedules to generate N sets of mutated work schedules;
• performing optimization calculations on the L sets of intermediate work schedules, the M sets of crossed work schedules and the N sets of mutated work schedules to generate a target work schedule;
• and
• automatically performing dispatch on the CMP machines according to the target work schedule;
• wherein the step of performing optimization calculations on the L sets of intermediate work schedules, the M sets of crossed work schedules and the N sets of mutated work schedules to generate a target work schedule comprises:
• according to a summation of processing time, trial production process processing time and head idle seasoning time of the CMP machines, selecting a work schedule from the L sets of intermediate work schedules, the M sets of crossed work schedules and the N sets of mutated work schedules as the target work schedule.