Hybrid wide field of view target system

A non-transitory computer-readable medium encoded with instructions that, when executed by a processor, establish processes for performing a computer-implemented method of automatically aligning, and/or testing alignment of, a workpiece having a workpiece optical axis, wherein during a first time period the workpiece comprises a first lens and a first image sensor collectively having a first field of view, and during a second time period the workpiece comprises a second lens and a second image sensor collectively having a second field of view wider than the first field of view, the processes comprising:

• a process configured to translate a target substantially along the respective workpiece optical axis, in response to a first command from the processor, to a position specified by the processor, the processor being configured to thereby selectively adjust optical spacing between the target and the workpiece and, during the first time period, form a first image of the target on the first image sensor, via a sequence of an intermediate lens, disposed optically between the target and the workpiece, and the first lens, the first image filling a first fraction of the first image sensor, and during the second time period, form a second image of the target on a central portion of the second image sensor, via a sequence of the intermediate lens and the second lens, the second image filling a fraction of the second image sensor smaller than the first fraction;
• a process configured to control a plurality of collimators disposed peripheral to the intermediate lens, each collimator having a respective reticle and being configured to project, during the second time period, a respective image of the reticle, through the second lens, on the second image sensor, without the image of the reticle passing through the intermediate lens, such that the image of the reticle extends outside an outer boundary of the second image of the target on the second image sensor;
• a process configured to control a robot configured to grasp and, in response to a second command from the processor, scan at least a portion of the workpiece along a trajectory;
• and
• a process configured to analyze signals acquired from the workpiece while the workpiece is scanned along the trajectory and thereby quantitatively assess a degree of optical alignment of the workpiece.