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US 11,397,312 B2Granted
Structured illumination with optimized illumination geometry
AssigneeCad Zeiss Microscopy GmbH
InventorsBenedict Diederich, Rolf Wartmann, Harald Schadwinkel, Lars Stoppe
Life of this patent
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Abstract
An object transfer function for a sample object is determined on the basis of a reference measurement. Subsequently, an optimization is carried out in order to find an optimized illumination geometry on the basis of the object transfer function and an optical transfer function for an optical unit.
Claims10
A method, comprising:
- based on a reference measurement, determining an object transfer function for a sample object,
- based on the object transfer function and further based on an optical transfer function for an optical unit, performing an optimization for finding an optimized illumination geometry, and
- actuating at least one illumination module for illuminating the sample object with the optimized illumination geometry using the optical unit.
Dependencies are inferred from the claim text.