Auger electron microscope and analysis method

An Auger electron microscope comprising:

• a measuring unit that performs measurement by Auger electron spectroscopy;
• and
• a processing unit that analyzes Auger spectra obtained by the measuring unit,
• the processing unit performing processing of:
• acquiring an actually measured Auger spectrum obtained by measuring a test specimen containing an analysis target element;
• acquiring a plurality of first standard Auger spectra obtained by measuring a plurality of standard specimens each containing the same analysis target element but in different chemical states;
• calculating, based on a test specimen measurement condition that is a measurement condition when the test specimen has been measured and a standard specimen measurement condition that is a measurement condition when the plurality of standard specimens have been measured, a plurality of second standard Auger spectra under the test specimen measurement condition from the plurality of first standard Auger spectra;
• and
• performing a curve fitting calculation of the actually measured Auger spectrum by using the plurality of calculated second standard Auger spectra
• wherein in the processing of calculating the plurality of second standard Auger spectra, a peak intensity of the first standard Auger spectra is corrected based on the test specimen measurement condition and the standard specimen measurement condition.