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US 11,390,951 B2Granted
Fluid control device
AssigneeFujikin Incorporated
InventorsAtsushi Hidaka, Takatoshi Nakatani, Keisuke Nakatsuji, Keiji Hirao, Yukio Minami, Nobukazu Ikeda
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Abstract
In order to appropriately control temperatures of fluid heating sections that are maintained at different temperatures, the fluid control device (100) comprises a plurality of fluid heating sections (1) connected to each other and each having a flow path or a fluid accommodating portion inside, heaters (10) configured to heat each of the plurality of fluid heating sections to different temperatures, and heat insulating members (13, 13′) disposed between adjacent fluid heating sections.
Claims10
A fluid control device comprising:
- a plurality of fluid heating sections connected to each other and each provided with a flow path or a fluid accommodation portion inside, the plurality of fluid heating sections including a vaporizing section, a preheating section disposed adjacent to the vaporizing section for preheating a liquid to be supplied to the vaporizing section, and a fluid control measurement section disposed adjacent to the vaporizing section for controlling or measuring a gas delivered from the vaporizing section;
- heaters each configured to heat each of the plurality of fluid heating sections to different temperatures;
- a heat insulating member disposed between the preheating section and the vaporizing section;
- a stop valve provided downstream of the fluid control measurement section;
- and
- a further heat insulating member provided outside the stop valve and disposed between a valve downstream flow path of the stop valve and a valve upstream flow path of the stop valve;
- wherein the heaters are configured to heat corresponding fluid heating sections from outside.
4 more elements
Dependencies are inferred from the claim text.