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US 11,390,718 B2Granted
Elastic parylene
AssigneeSpecialty Coating Systems, Inc.
InventorsAndreas Greiner, Tobias Moss, Rakesh Kumar
Life of this patent
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Abstract
Elastic Parylene films produced via chemical vapor deposition polymerization (CVDP) on a substrate are disclosed.
Claims10
A chemically cross-linked elastic Parylene or poly(para-xylylene) (PPX) polymer film having a Young's modulus of between about 0.01 GPa and about 0.05 GPa.
A chemically cross-linked elastic Parylene or poly(para-xylylene) (PPX) polymer film prepared by steps of:
- mixing a substituted paracyclophane and a vinyl-functionalized paracyclophane to form a mixture;
- and
- co-polymerizing the mixture via a chemical vapor deposition polymerization (CVDP) process on a substrate to form the chemically cross-linked elastic polymer film.
Dependencies are inferred from the claim text.