Systems for controlling plasma reactors
AssigneeReCarbon, Inc.
InventorsCurtis Peter Tom, Fei Xie, Wei Li
Life of this patent
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Abstract
The present invention provides a plasma generating system that includes: a programmable logic controller (PLC) and a plurality of reactor systems coupled to the PLC by a daisy chain network. Each of the plurality of reactor systems include: a microwave generator for generating microwave energy; and a power supply for providing electrical power to the microwave generator and including a controller, where the controller comprises: at least one microprocessor; and a module communicatively coupled to the at least one processor and including at least one of digital input-output (DIO) and analogue input-output (AIO).
Claims21
A plasma generating system, comprising:
- a microwave generator for generating microwave energy;
- a power supply for providing electrical power to the microwave generator and including a controller that comprises:
- at least one microprocessor;
- and
- a module communicatively coupled to the at least one processor and including at least one of digital input-output (D10) and analogue input-output (A10),
- a waveguide coupled to the microwave generator and configured to transmit the microwave energy therethrough;
- an inner wall disposed within the waveguide to define a plasma cavity, a plasma being generated within the plasma cavity using the microwave energy;
- an adaptor mounted on a bottom side of the waveguide and including one or more passageways through which a first gas is introduced into the plasma cavity and configured to generate a first vortex flow within the plasma cavity using the first gas, the adaptor having a through hole through which a gas that is processed by the plasma and moves toward the bottom side of the waveguide exits the plasma cavity;
- and
- a plasma stabilizer having a shape of a circular hollow cylinder and installed on a top side of the waveguide and protruding into the plasma cavity, a longitudinal direction of the plasma stabilizer being parallel to a rotational axis of the first vortex flow, wherein the one or more passageways of the adaptor are disposed on the bottom side of the waveguide.
A plasma generating system, comprising:
- a programmable logic controller (PLC);
- and
- a plurality of reactor systems coupled to the PLC by a daisy chain network, wherein the PLC is configured to send a command to each of the plurality of reactor systems by sending a signal via the daisy chain network, each of the plurality of reactor systems including:
- a microwave generator for generating microwave energy;
- a power supply for providing electrical power to the microwave generator and including a controller that comprises:
- at least one microprocessor;
- and
- a module communicatively coupled to the at least one processor and including at least one of digital input-output (D10) and analogue input-output (A10).
Dependencies are inferred from the claim text.