MEMS microphone
AssigneeWeifang Goertek Microelectronics Co., Ltd.
InventorsQuanbo Zou, Yongwei Dong
Life of this patent
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Abstract
An MEMS microphone is provided, comprising: a first substrate; a vibration diaphragm supported above the first substrate by a spacing portion, the first substrate, the spacing portion, and the vibration diaphragm enclosing a vacuum chamber, and a static deflection distance of the vibration diaphragm under an atmospheric pressure being less than a distance between the vibration diaphragm and the first substrate; and a floating gate field effect transistor outputting a varying electrical signal, the floating gate field effect transistor including a source electrode and a drain electrode both provided on the first substrate and a floating gate provided on the vibration diaphragm.
Claims9
An MEMS microphone, comprising:
- a first substrate,
- a vibration diaphragm supported above the first substrate by a spacing portion, the first substrate, the spacing portion, and the vibration diaphragm enclosing a vacuum chamber, wherein a static deflection distance of the vibration diaphragm under an atmospheric pressure comprises less than a distance between the vibration diaphragm and the first substrate, and
- a floating gate field effect transistor configured to output a varying electrical signal, the floating gate field effect transistor including a source electrode and a drain electrode provided on the first substrate and a floating gate provided on the vibration diaphragm, wherein the vibration diaphragm has a mechanical sensitivity from 0.02 nm/Pa to 0.9 nm/Pa.
Dependencies are inferred from the claim text.