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US 11,388,525 B2Granted
MEMS microphone and a manufacturing method thereof
AssigneeWeifang Goertek Microelectronics Co., Ltd.
InventorQuanbo Zou
Life of this patent
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Abstract
A MEMS microphone and a manufacturing method thereof are provided. The MEMS microphone comprises a MEMS microphone chip and a housing with an acoustic port. The MEMS microphone chip is mounted in the housing, and a mesh plug is mounted in the acoustic port and made from a mesh material which has a mesh structure that is suitable for passage of sound.
Claims8
A MEMS microphone, comprising:
- a MEMS microphone chip;
- a housing, which has an acoustic port, and
- a mesh plug,
- wherein the MEMS microphone chip is mounted in the housing, and the mesh plug is mounted in the acoustic port,
- wherein the mesh plug is made from a mesh material which has a mesh structure adapted for passing sound pressure to the MEMS microphone chip, and
- wherein the mesh plug has a step structure so that a first part of the mesh plug is inside the acoustic port and a second part of the mesh plug is outside the acoustic port.
3 more elements
A method for manufacturing a MEMS microphone;
- comprising:
- mounting a mesh layer on a carrier substrate;
- machining the mesh layer into a mesh plug;
- forming an acoustic port on a housing of the MEMS microphone;
- dispensing adhesive into the acoustic port;
- assembling the mesh plug into the acoustic port;
- releasing the carrier substrate;
- and
- mounting a MEMS microphone chip and an ASIC chip in the housing,
- wherein the mesh plug is machined into a step structure so that the mesh plug is assembled into the acoustic port with a first part inside the acoustic port and a second part outside the acoustic port.
7 more elements
Dependencies are inferred from the claim text.