Microelectromechanical microphone having a stoppage member

A microelectromechanical microphone device comprising:

• a substrate defining an opening to receive a pressure wave;
• a flexible plate mechanically coupled to the substrate and configured to be deformed by the pressure wave;
• and
• a stoppage member affixed to the flexible plate and extending perpendicularly relative to a surface of the flexible plate opposite a surface of the substrate, the stoppage member having a distal surface that is separated from the surface of the substrate by a clearance distance, wherein the stoppage member is configured to limit motion of the flexible plate in response to the pressure wave including a threshold amplitude.

A device comprising:

• a microelectromechanical microphone device comprising:
• a substrate defining a first opening to receive a pressure wave;
• a flexible plate mechanically coupled to the substrate and configured to be deformed by the pressure wave;
• a rigid plate mechanically coupled to the flexible plate, the rigid plate defining multiple openings that permit passage of the pressure wave;
• and
• at least one stoppage member assembled in a spatial relationship with the flexible plate, the at least one stoppage member configured to limit motion of the flexible plate in response to the pressure wave including a threshold amplitude;
• and
• a circuit coupled to the microelectromechanical microphone device and configured to receive a first signal indicative of a capacitance representative of an amplitude of the pressure wave, the circuit being further configured to generate a second signal representative of the amplitude of the pressure wave.