Elastic wave device, high-frequency front end circuit, and communication device
AssigneeMurata Manufacturing Co., Ltd.
InventorsTaku Kikuchi, Akira Michigami
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AssigneeMurata Manufacturing Co., Ltd.
InventorsTaku Kikuchi, Akira Michigami
Estimating the term…
An elastic wave device includes first and second IDT electrodes provided over a principal surface of a piezoelectric substrate. The first IDT electrode is provided directly on a principal surface of the piezoelectric substrate and the second IDT electrode is provided over the principal surface with a first dielectric layer interposed therebetween. A second dielectric layer extends to upper portions of the first and second IDT electrodes. A wiring electrode passes over the second dielectric layer and extends to the upper portions of the first and second IDT electrodes. Respective angles between first and second side surfaces of the second dielectric layer and the principal surface of the piezoelectric substrate are smaller than an angle between a side surface of the first dielectric layer and the principal surface of the piezoelectric substrate.
An elastic wave device comprising:
Dependencies are inferred from the claim text.