System and method for a MEMS device
AssigneeInfineon Technologies AG
InventorsDavid Tumpold, Alfons Dehe, Christoph Glacer
Life of this patent
Estimating the term…
Abstract
According to an embodiment, a microelectromechanical systems MEMS device includes a first membrane attached to a support structure that a first plurality of acoustic vents; a second membrane attached to the support structure that includes a second plurality of acoustic vents, where the first plurality of acoustic vents and the second plurality of acoustic vents do not overlap; and a closing mechanism coupled to the first membrane and the second membrane.
Claims20
A microelectromechanical systems (MEMS) transducer comprising:
- a first deflectable membrane attached to a support structure and comprising a first plurality of perforations;
- a second deflectable membrane attached to the support structure and comprising a second plurality of perforations, the second plurality of perforations offset from the first plurality of perforations;
- a closing mechanism coupled to the first deflectable membrane and the second deflectable membrane, the closing mechanism configured to
- close an acoustic path through the first deflectable membrane and the second deflectable membrane by moving the first deflectable membrane and the second deflectable membrane into contact during a first mode, and
- open the acoustic path by moving the first deflectable membrane and the second deflectable membrane out of contact during a second mode, wherein the first plurality of perforations are sealed to the second deflectable membrane and the second plurality of perforations are sealed to the first deflectable membrane when the acoustic path is closed;
- and
- an actuating mechanism configured to excite oscillations of the first deflectable membrane and the second deflectable membrane.
A microelectromechanical systems (MEMS) device comprising:
- a first membrane attached to a support structure and comprising a first plurality of acoustic vents;
- a second membrane attached to the support structure and comprising a second plurality of acoustic vents, the second plurality of acoustic vents offset from the first plurality of acoustic vents, wherein the first plurality of acoustic vents and the second plurality of acoustic vents do not overlap;
- and
- a closing mechanism coupled to the first membrane and the second membrane, the closing mechanism configured to
- close an acoustic path through the first membrane and the second membrane by moving the first membrane and the second membrane into contact during a first mode, wherein the first plurality of acoustic vents are sealed to the second membrane and the second plurality of acoustic vents are sealed to the first membrane when the acoustic path is closed, and
- open the acoustic path by moving the first membrane and the second membrane out of contact during a second mode.
A method of operating a MEMS device comprising a first membrane attached to a support structure and including a first plurality of acoustic vents, and a second membrane attached to the support structure and including a second plurality of acoustic vents, wherein the second plurality of acoustic vents are offset from and do not overlap the first plurality of acoustic vents, the method comprising:
- closing an acoustic path through the first membrane and the second membrane by moving the first membrane and the second membrane into contact during a first mode, wherein the first plurality of acoustic vents are sealed to the second membrane and the second plurality of acoustic vents are sealed to the first membrane when the acoustic path is closed;
- and
- opening the acoustic path by moving the first membrane and the second membrane out of contact during a second mode.
Dependencies are inferred from the claim text.