Back to results
US 11,387,291 B2Granted
Photoelectric sensor, display panel and manufacturing method thereof
AssigneeBoe Technology Group Co., Ltd.
InventorsShuang Liang, Yingwei Liu, Zhanfeng Cao, Zhiwei Liang, Muxin Di
Life of this patent
Estimating the term…
Abstract
Disclosed herein is a photoelectric sensor, display panel and their manufacturing method. The photoelectric sensor may comprise a photodeformable unit and a piezoelectric unit in contact with the photodeformable unit.
Claims16
A photoelectric sensor comprising:
- a photodeformable unit;
- a piezoelectric unit in contact with the photodeformable unit;
- a first film layer having a hollow area;
- and
- a second film layer having a groove opening into the hollow area of the first film layer;
- wherein the photodeformable unit and a first portion of the piezoelectric unit are located in the groove of the second film layer.
3 more elements
A method of making a display panel, comprising:
- forming a piezoelectric unit on a substrate;
- forming a photodeformable unit on top of and in contact with the piezoelectric unit;
- forming a first thin-film transistor on the substrate;
- forming a first film layer on a surface of the first thin-film transistor away from the substrate;
- forming a first via hole, a second via hole and a hollow area on the first film layer;
- and
- forming a first sacrifice layer at the hollow area, wherein the piezoelectric unit is formed partially on top of the first film layer and partially on top of the first sacrifice layer.
4 more elements
Dependencies are inferred from the claim text.