Semiconductor memory
AssigneeKioxia Corporation
InventorGo Oike
Life of this patent
Estimating the term…
Abstract
A semiconductor memory includes first to fourth stacked bodies. The first stacked body includes a first conductor, and an alternating stack of first insulators and second conductors above the first conductor in a region. The second stacked body includes a third conductor, and an alternating stack of second insulators and fourth conductors above the third conductor in another region. The third stacked body includes a fifth conductor adjacent to the first conductor via a third insulator in a separation region. The fourth stacked body includes a seventh conductor adjacent to the third conductor via a fifth insulator in the separation region. The fifth conductor is electrically insulated from the seventh conductor.
Claims14
A semiconductor memory comprising:
- a first stacked body including a first conductor and an alternating stack of first insulators and second conductors above the first conductor, the first stacked body including first and second regions in order along a first direction crossing a stacking direction of the first stacked body;
- a second stacked body including a third conductor and an alternating stack of second insulators and fourth conductors above the third conductor, the second stacked body including third and fourth regions in order along the first direction;
- a columnar first contact provided on a lowermost conductor among the second conductors in the first region;
- a columnar second contact provided on a lowermost conductor among the fourth conductors in the fourth region;
- a plurality of first pillars, each of the first pillars extending through the first stacked body in the second region, and including memory cell regions at intersections with the second conductors;
- a plurality of second pillars, each of the second pillars extending through the second stacked body in the third region, and including memory cell regions at intersections with the fourth conductors;
- a third stacked body provided between the first stacked body and the second stacked body, the third stacked body including a fifth conductor and an alternating stack of fourth insulators and sixth conductors above the fifth conductor;
- a third insulator provided between the fifth conductor and the first conductor;
- a fourth stacked body provided between the third stacked body and the second stacked body, the fourth stacked body including a seventh conductor and an alternating stack of fifth insulators and eighth conductors above the seventh conductor;
- a sixth insulator provided between the seventh conductor and the third conductor;
- and
- a fifth stacked body provided between the third stacked body and the fourth stacked body, the fifth stacked body including a seventh insulator and an alternating stack of eighth insulators and ninth insulators above the seventh insulator,
- wherein the ninth insulators are in contact with the sixth conductors, respectively, and the eighth conductors, respectively.
Dependencies are inferred from the claim text.