Semiconductor device and method of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsDaeho Yoon, Daeseon Jeon, Jaeyoung Choi
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Abstract
Disclosed are semiconductor devices and methods of manufacturing the same. The method comprises providing a layout comprising a first group that includes first and second patterns and a second group that includes third and fourth patterns, examining a bridge risk region in the layout, biasing one end of at least one of the first and third patterns, and forming first to fourth conductive patterns by respectively using the first to fourth patterns of the layout. The one end of at least one of the first and third patterns are adjacent to the bridge risk region.
Claims8
A semiconductor device, comprising:
- a substrate;
- and
- first, second, third, and fourth conductive patterns on the substrate, the first to fourth conductive patterns extending in parallel to each other in a first direction and being sequentially arranged in a second direction crossing the first direction,
- wherein the third conductive pattern comprises on one side a first extension protruding toward the first conductive pattern and not contacting the second conductive pattern, and
- wherein the second conductive pattern comprises on one side a second extension protruding toward the fourth conductive pattern and not contacting the third conductive pattern,
- wherein the first extension and the second extension are spaced apart from each other in the first direction,
- wherein the first extension is aligned in the second direction with one end of the first conductive pattern and the second extension is aligned in the second direction with one end of the fourth conductive pattern such that the one end of the first conductive pattern and the one end of the fourth conductive pattern are also spaced apart from each other in the first direction.
A semiconductor device, comprising:
- a substrate;
- and
- first, second, third, and fourth conductive patterns on the substrate, the first to fourth conductive patterns extending in parallel to each other in a first direction and being sequentially arranged in a second direction crossing the first direction,
- wherein a first side of the third conductive pattern faces a second side of the second conductive pattern,
- wherein the third conductive pattern comprises a first extension protruding from the first side toward the second side of the second conductive pattern, the first extension being spaced apart from the second side,
- wherein the second conductive pattern comprises a second extension protruding from the second side toward the first side of the third conductive pattern, the second extension being spaced apart from the first side,
- wherein the first extension and the second extension are offset from each other in the first direction,
- wherein the first extension is aligned in the second direction with one end of the first conductive pattern and the second extension is aligned in the second direction with one end of the fourth conductive pattern such that the one end of the first conductive pattern and the one end of the fourth conductive pattern are also offset from each other in the first direction.
Dependencies are inferred from the claim text.