Conductive wafer lift pin o-ring gripper with resistor

A lift pin assembly, comprising:

• a base;
• and
• a plurality of lift pin holders, wherein each lift pin holder comprises:
• a first portion electrically coupled to the base by a first metal stud;
• a resistor disposed within the first portion;
• a second portion electrically coupled to the first portion by a second metal stud;
• and
• a first conductive member in the first portion coupled to the first metal stud and a second conductive member in the first portion coupled to the second metal stud;
• wherein the first portion includes a dielectric cover disposed about the resistor and the second conductive member, the dielectric cover enclosing an uppermost surface of the second conductive member.

A plasma processing chamber, comprising:

• a bottom;
• a sidewall;
• a lid disposed over the sidewall, wherein the bottom, the sidewall and the lid define a processing volume;
• and
• a substrate support assembly disposed in the processing volume, wherein the substrate support assembly comprises:
• a substrate support;
• and
• a lift pin assembly, comprising:
• a base;
• and
• a plurality of lift pin holders, wherein each lift pin holder comprises:
• a first portion electrically coupled to the base by a first metal connector;
• a resistor disposed within a dielectric tube in the first portion;
• a second portion electrically coupled to the first portion by a second metal connector;
• and
• a first conductive member in the first portion coupled to the first metal connector and a second conductive member in the first portion coupled to the second metal connector;
• wherein the first portion includes a dielectric cover disposed about the dielectric tube, the dielectric cover separated from the dielectric tube by a circumferential gap.